10/19/2011	12:02:58 AM	Helium valve closed
10/19/2011	12:02:58 AM	BCl3 valve closed
10/19/2011	12:02:58 AM	PH3 valve closed
10/19/2011	12:02:58 AM	Main Vac valve closed
10/19/2011	12:02:58 AM	Bypass valve closed
10/19/2011	12:02:58 AM	H2 valve opened
10/19/2011	12:02:58 AM	SiCl4 pre valve opened
10/19/2011	12:02:58 AM	SiCl4 post valve opened
10/19/2011	12:02:58 AM	Bubbler valve opened
10/19/2011	12:02:58 AM	Helium MFC set to  0.000000
10/19/2011	12:02:58 AM	H2 MFC set to  500.000000
10/19/2011	12:02:58 AM	BCl3 MFC set to  0.000000
10/19/2011	12:02:58 AM	PHl3 MFC set to  0.000000
10/19/2011	12:02:58 AM	SiCl4 MFC set to  50.000000
10/19/2011	12:02:58 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:02:58 AM	Tube furnace set to 1000
10/19/2011	12:12:58 AM	Helium valve closed
10/19/2011	12:12:58 AM	BCl3 valve closed
10/19/2011	12:12:58 AM	PH3 valve closed
10/19/2011	12:12:58 AM	SiCl4 pre valve closed
10/19/2011	12:12:58 AM	SiCl4 post valve closed
10/19/2011	12:12:58 AM	Main Vac valve closed
10/19/2011	12:12:58 AM	Bypass valve closed
10/19/2011	12:12:58 AM	H2 valve opened
10/19/2011	12:12:58 AM	Bubbler valve opened
10/19/2011	12:12:58 AM	Helium MFC set to  0.000000
10/19/2011	12:12:58 AM	H2 MFC set to  500.000000
10/19/2011	12:12:58 AM	BCl3 MFC set to  0.000000
10/19/2011	12:12:58 AM	PHl3 MFC set to  0.000000
10/19/2011	12:12:58 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:12:58 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:12:58 AM	Tube furnace set to 750
10/19/2011	12:17:58 AM	H2 valve closed
10/19/2011	12:17:58 AM	BCl3 valve closed
10/19/2011	12:17:58 AM	PH3 valve closed
10/19/2011	12:17:58 AM	SiCl4 pre valve closed
10/19/2011	12:17:58 AM	SiCl4 post valve closed
10/19/2011	12:17:58 AM	Main Vac valve closed
10/19/2011	12:17:58 AM	Bypass valve closed
10/19/2011	12:17:58 AM	Helium valve opened
10/19/2011	12:17:58 AM	Bubbler valve opened
10/19/2011	12:17:58 AM	Helium MFC set to  500.000000
10/19/2011	12:17:58 AM	H2 MFC set to  0.000000
10/19/2011	12:17:58 AM	BCl3 MFC set to  0.000000
10/19/2011	12:17:58 AM	PHl3 MFC set to  0.000000
10/19/2011	12:17:58 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:17:58 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:17:58 AM	Tube furnace set to 0
10/19/2011	12:29:31 AM	Helium valve closed
10/19/2011	12:29:31 AM	H2 valve closed
10/19/2011	12:29:31 AM	BCl3 valve closed
10/19/2011	12:29:31 AM	PH3 valve closed
10/19/2011	12:29:31 AM	SiCl4 pre valve closed
10/19/2011	12:29:31 AM	SiCl4 post valve closed
10/19/2011	12:29:31 AM	Main Vac valve closed
10/19/2011	12:29:31 AM	Bypass valve closed
10/19/2011	12:29:31 AM	Bubbler valve closed
10/19/2011	12:29:31 AM	Helium MFC set to  0.000000
10/19/2011	12:29:31 AM	H2 MFC set to  0.000000
10/19/2011	12:29:31 AM	BCl3 MFC set to  0.000000
10/19/2011	12:29:31 AM	PHl3 MFC set to  0.000000
10/19/2011	12:29:31 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:29:31 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:29:32 AM	Tube furnace set to 0
10/19/2011	12:29:33 AM	Run finished at 12:29 AM
10/19/2011	12:29:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	12:29:36 AM	Recipe started at 12:29 AM
10/19/2011	12:29:36 AM	Helium valve closed
10/19/2011	12:29:36 AM	H2 valve closed
10/19/2011	12:29:36 AM	BCl3 valve closed
10/19/2011	12:29:36 AM	PH3 valve closed
10/19/2011	12:29:36 AM	SiCl4 pre valve closed
10/19/2011	12:29:36 AM	SiCl4 post valve closed
10/19/2011	12:29:36 AM	Main Vac valve closed
10/19/2011	12:29:36 AM	Bypass valve closed
10/19/2011	12:29:36 AM	Bubbler valve closed
10/19/2011	12:29:36 AM	Helium MFC set to  0.000000
10/19/2011	12:29:36 AM	H2 MFC set to  0.000000
10/19/2011	12:29:36 AM	BCl3 MFC set to  0.000000
10/19/2011	12:29:36 AM	PHl3 MFC set to  0.000000
10/19/2011	12:29:36 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:29:36 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:29:36 AM	Tube furnace set to 0
10/19/2011	12:29:39 AM	H2 valve closed
10/19/2011	12:29:39 AM	BCl3 valve closed
10/19/2011	12:29:39 AM	PH3 valve closed
10/19/2011	12:29:39 AM	SiCl4 pre valve closed
10/19/2011	12:29:39 AM	SiCl4 post valve closed
10/19/2011	12:29:39 AM	Main Vac valve closed
10/19/2011	12:29:39 AM	Bypass valve closed
10/19/2011	12:29:39 AM	Bubbler valve closed
10/19/2011	12:29:39 AM	Helium valve opened
10/19/2011	12:29:39 AM	Helium MFC set to  500.000000
10/19/2011	12:29:39 AM	H2 MFC set to  0.000000
10/19/2011	12:29:39 AM	BCl3 MFC set to  0.000000
10/19/2011	12:29:39 AM	PHl3 MFC set to  0.000000
10/19/2011	12:29:39 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:29:39 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:29:39 AM	Tube furnace set to 0
10/19/2011	12:29:40 AM	Helium valve closed
10/19/2011	12:29:40 AM	H2 valve closed
10/19/2011	12:29:40 AM	BCl3 valve closed
10/19/2011	12:29:40 AM	PH3 valve closed
10/19/2011	12:29:40 AM	SiCl4 pre valve closed
10/19/2011	12:29:40 AM	SiCl4 post valve closed
10/19/2011	12:29:40 AM	Main Vac valve closed
10/19/2011	12:29:40 AM	Bypass valve closed
10/19/2011	12:29:40 AM	Bubbler valve closed
10/19/2011	12:29:40 AM	Helium MFC set to  0.000000
10/19/2011	12:29:40 AM	H2 MFC set to  0.000000
10/19/2011	12:29:40 AM	BCl3 MFC set to  0.000000
10/19/2011	12:29:40 AM	PHl3 MFC set to  0.000000
10/19/2011	12:29:40 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:29:40 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:29:40 AM	Tube furnace set to 0
10/19/2011	12:29:41 AM	Run finished at 12:29 AM
10/19/2011	12:29:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	12:36:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	12:36:09 AM	Recipe started at 12:36 AM
10/19/2011	12:36:09 AM	Helium valve closed
10/19/2011	12:36:09 AM	H2 valve closed
10/19/2011	12:36:09 AM	BCl3 valve closed
10/19/2011	12:36:09 AM	PH3 valve closed
10/19/2011	12:36:09 AM	SiCl4 pre valve closed
10/19/2011	12:36:09 AM	SiCl4 post valve closed
10/19/2011	12:36:09 AM	Main Vac valve closed
10/19/2011	12:36:09 AM	Bubbler valve closed
10/19/2011	12:36:09 AM	Bypass valve opened
10/19/2011	12:36:09 AM	Helium MFC set to  0.000000
10/19/2011	12:36:09 AM	H2 MFC set to  0.000000
10/19/2011	12:36:09 AM	BCl3 MFC set to  0.000000
10/19/2011	12:36:09 AM	PHl3 MFC set to  0.000000
10/19/2011	12:36:09 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:36:09 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:36:09 AM	Tube furnace set to 0
10/19/2011	12:37:14 AM	Helium valve closed
10/19/2011	12:37:14 AM	H2 valve closed
10/19/2011	12:37:14 AM	BCl3 valve closed
10/19/2011	12:37:14 AM	PH3 valve closed
10/19/2011	12:37:14 AM	SiCl4 pre valve closed
10/19/2011	12:37:14 AM	SiCl4 post valve closed
10/19/2011	12:37:14 AM	Main Vac valve closed
10/19/2011	12:37:14 AM	Bubbler valve closed
10/19/2011	12:37:14 AM	Bypass valve opened
10/19/2011	12:37:14 AM	Helium MFC set to  0.000000
10/19/2011	12:37:14 AM	H2 MFC set to  0.000000
10/19/2011	12:37:14 AM	BCl3 MFC set to  0.000000
10/19/2011	12:37:14 AM	PHl3 MFC set to  0.000000
10/19/2011	12:37:14 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:37:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:37:14 AM	Tube furnace set to 0
10/19/2011	12:38:14 AM	Helium valve closed
10/19/2011	12:38:14 AM	H2 valve closed
10/19/2011	12:38:14 AM	BCl3 valve closed
10/19/2011	12:38:14 AM	PH3 valve closed
10/19/2011	12:38:14 AM	SiCl4 pre valve closed
10/19/2011	12:38:14 AM	SiCl4 post valve closed
10/19/2011	12:38:14 AM	Bypass valve closed
10/19/2011	12:38:14 AM	Bubbler valve closed
10/19/2011	12:38:14 AM	Main Vac valve opened
10/19/2011	12:38:14 AM	Helium MFC set to  0.000000
10/19/2011	12:38:14 AM	H2 MFC set to  0.000000
10/19/2011	12:38:14 AM	BCl3 MFC set to  0.000000
10/19/2011	12:38:14 AM	PHl3 MFC set to  0.000000
10/19/2011	12:38:14 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:38:14 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:38:14 AM	Tube furnace set to 0
10/19/2011	12:38:15 AM	Run finished at 12:38 AM
10/19/2011	12:38:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	12:47:51 AM	Recipe started at 12:47 AM
10/19/2011	12:47:51 AM	Helium valve closed
10/19/2011	12:47:51 AM	H2 valve closed
10/19/2011	12:47:51 AM	BCl3 valve closed
10/19/2011	12:47:51 AM	PH3 valve closed
10/19/2011	12:47:51 AM	SiCl4 pre valve closed
10/19/2011	12:47:51 AM	SiCl4 post valve closed
10/19/2011	12:47:51 AM	Bypass valve closed
10/19/2011	12:47:51 AM	Bubbler valve closed
10/19/2011	12:47:51 AM	Main Vac valve opened
10/19/2011	12:47:51 AM	Helium MFC set to  0.000000
10/19/2011	12:47:51 AM	H2 MFC set to  0.000000
10/19/2011	12:47:51 AM	BCl3 MFC set to  0.000000
10/19/2011	12:47:51 AM	PHl3 MFC set to  0.000000
10/19/2011	12:47:51 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:47:51 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:47:51 AM	Tube furnace set to 150
10/19/2011	12:48:21 AM	H2 valve closed
10/19/2011	12:48:21 AM	BCl3 valve closed
10/19/2011	12:48:21 AM	PH3 valve closed
10/19/2011	12:48:21 AM	SiCl4 pre valve closed
10/19/2011	12:48:21 AM	SiCl4 post valve closed
10/19/2011	12:48:21 AM	Bypass valve closed
10/19/2011	12:48:21 AM	Bubbler valve closed
10/19/2011	12:48:21 AM	Helium valve opened
10/19/2011	12:48:21 AM	Main Vac valve opened
10/19/2011	12:48:21 AM	Helium MFC set to  20.000000
10/19/2011	12:48:21 AM	H2 MFC set to  0.000000
10/19/2011	12:48:21 AM	BCl3 MFC set to  0.000000
10/19/2011	12:48:21 AM	PHl3 MFC set to  0.000000
10/19/2011	12:48:21 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:48:21 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:48:21 AM	Tube furnace set to 150
10/19/2011	12:48:51 AM	Helium valve closed
10/19/2011	12:48:51 AM	H2 valve closed
10/19/2011	12:48:51 AM	BCl3 valve closed
10/19/2011	12:48:51 AM	PH3 valve closed
10/19/2011	12:48:51 AM	SiCl4 pre valve closed
10/19/2011	12:48:51 AM	SiCl4 post valve closed
10/19/2011	12:48:51 AM	Bypass valve closed
10/19/2011	12:48:51 AM	Bubbler valve closed
10/19/2011	12:48:51 AM	Main Vac valve opened
10/19/2011	12:48:51 AM	Helium MFC set to  0.000000
10/19/2011	12:48:51 AM	H2 MFC set to  0.000000
10/19/2011	12:48:51 AM	BCl3 MFC set to  0.000000
10/19/2011	12:48:51 AM	PHl3 MFC set to  0.000000
10/19/2011	12:48:51 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:48:51 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:48:51 AM	Tube furnace set to 150
10/19/2011	12:49:21 AM	H2 valve closed
10/19/2011	12:49:21 AM	BCl3 valve closed
10/19/2011	12:49:21 AM	PH3 valve closed
10/19/2011	12:49:21 AM	SiCl4 pre valve closed
10/19/2011	12:49:21 AM	SiCl4 post valve closed
10/19/2011	12:49:21 AM	Bypass valve closed
10/19/2011	12:49:21 AM	Bubbler valve closed
10/19/2011	12:49:21 AM	Helium valve opened
10/19/2011	12:49:21 AM	Main Vac valve opened
10/19/2011	12:49:21 AM	Helium MFC set to  20.000000
10/19/2011	12:49:21 AM	H2 MFC set to  0.000000
10/19/2011	12:49:21 AM	BCl3 MFC set to  0.000000
10/19/2011	12:49:21 AM	PHl3 MFC set to  0.000000
10/19/2011	12:49:21 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:49:21 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:49:21 AM	Tube furnace set to 150
10/19/2011	12:49:51 AM	Helium valve closed
10/19/2011	12:49:51 AM	H2 valve closed
10/19/2011	12:49:51 AM	BCl3 valve closed
10/19/2011	12:49:51 AM	PH3 valve closed
10/19/2011	12:49:51 AM	SiCl4 pre valve closed
10/19/2011	12:49:51 AM	SiCl4 post valve closed
10/19/2011	12:49:51 AM	Bypass valve closed
10/19/2011	12:49:51 AM	Bubbler valve closed
10/19/2011	12:49:51 AM	Main Vac valve opened
10/19/2011	12:49:51 AM	Helium MFC set to  0.000000
10/19/2011	12:49:51 AM	H2 MFC set to  0.000000
10/19/2011	12:49:51 AM	BCl3 MFC set to  0.000000
10/19/2011	12:49:51 AM	PHl3 MFC set to  0.000000
10/19/2011	12:49:51 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:49:51 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:49:52 AM	Tube furnace set to 150
10/19/2011	12:50:22 AM	H2 valve closed
10/19/2011	12:50:22 AM	BCl3 valve closed
10/19/2011	12:50:22 AM	PH3 valve closed
10/19/2011	12:50:22 AM	SiCl4 pre valve closed
10/19/2011	12:50:22 AM	SiCl4 post valve closed
10/19/2011	12:50:22 AM	Bypass valve closed
10/19/2011	12:50:22 AM	Bubbler valve closed
10/19/2011	12:50:22 AM	Helium valve opened
10/19/2011	12:50:22 AM	Main Vac valve opened
10/19/2011	12:50:22 AM	Helium MFC set to  20.000000
10/19/2011	12:50:22 AM	H2 MFC set to  0.000000
10/19/2011	12:50:22 AM	BCl3 MFC set to  0.000000
10/19/2011	12:50:22 AM	PHl3 MFC set to  0.000000
10/19/2011	12:50:22 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:50:22 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:50:22 AM	Tube furnace set to 150
10/19/2011	12:50:52 AM	Helium valve closed
10/19/2011	12:50:52 AM	H2 valve closed
10/19/2011	12:50:52 AM	BCl3 valve closed
10/19/2011	12:50:52 AM	PH3 valve closed
10/19/2011	12:50:52 AM	SiCl4 pre valve closed
10/19/2011	12:50:52 AM	SiCl4 post valve closed
10/19/2011	12:50:52 AM	Bypass valve closed
10/19/2011	12:50:52 AM	Bubbler valve closed
10/19/2011	12:50:52 AM	Main Vac valve opened
10/19/2011	12:50:52 AM	Helium MFC set to  0.000000
10/19/2011	12:50:52 AM	H2 MFC set to  0.000000
10/19/2011	12:50:52 AM	BCl3 MFC set to  0.000000
10/19/2011	12:50:52 AM	PHl3 MFC set to  0.000000
10/19/2011	12:50:52 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:50:52 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:50:52 AM	Tube furnace set to 150
10/19/2011	12:51:22 AM	H2 valve closed
10/19/2011	12:51:22 AM	BCl3 valve closed
10/19/2011	12:51:22 AM	PH3 valve closed
10/19/2011	12:51:22 AM	SiCl4 pre valve closed
10/19/2011	12:51:22 AM	SiCl4 post valve closed
10/19/2011	12:51:22 AM	Bypass valve closed
10/19/2011	12:51:22 AM	Bubbler valve closed
10/19/2011	12:51:22 AM	Helium valve opened
10/19/2011	12:51:22 AM	Main Vac valve opened
10/19/2011	12:51:22 AM	Helium MFC set to  20.000000
10/19/2011	12:51:22 AM	H2 MFC set to  0.000000
10/19/2011	12:51:22 AM	BCl3 MFC set to  0.000000
10/19/2011	12:51:22 AM	PHl3 MFC set to  0.000000
10/19/2011	12:51:22 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:51:22 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:51:22 AM	Tube furnace set to 150
10/19/2011	12:51:52 AM	Helium valve closed
10/19/2011	12:51:52 AM	H2 valve closed
10/19/2011	12:51:52 AM	BCl3 valve closed
10/19/2011	12:51:52 AM	PH3 valve closed
10/19/2011	12:51:52 AM	SiCl4 pre valve closed
10/19/2011	12:51:52 AM	SiCl4 post valve closed
10/19/2011	12:51:52 AM	Bypass valve closed
10/19/2011	12:51:52 AM	Bubbler valve closed
10/19/2011	12:51:52 AM	Main Vac valve opened
10/19/2011	12:51:52 AM	Helium MFC set to  0.000000
10/19/2011	12:51:52 AM	H2 MFC set to  0.000000
10/19/2011	12:51:52 AM	BCl3 MFC set to  0.000000
10/19/2011	12:51:52 AM	PHl3 MFC set to  0.000000
10/19/2011	12:51:52 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:51:52 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:51:52 AM	Tube furnace set to 150
10/19/2011	12:52:22 AM	H2 valve closed
10/19/2011	12:52:22 AM	BCl3 valve closed
10/19/2011	12:52:22 AM	PH3 valve closed
10/19/2011	12:52:22 AM	SiCl4 pre valve closed
10/19/2011	12:52:22 AM	SiCl4 post valve closed
10/19/2011	12:52:22 AM	Bypass valve closed
10/19/2011	12:52:22 AM	Bubbler valve closed
10/19/2011	12:52:22 AM	Helium valve opened
10/19/2011	12:52:22 AM	Main Vac valve opened
10/19/2011	12:52:22 AM	Helium MFC set to  20.000000
10/19/2011	12:52:22 AM	H2 MFC set to  0.000000
10/19/2011	12:52:22 AM	BCl3 MFC set to  0.000000
10/19/2011	12:52:22 AM	PHl3 MFC set to  0.000000
10/19/2011	12:52:22 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:52:22 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:52:23 AM	Tube furnace set to 150
10/19/2011	12:52:53 AM	Helium valve closed
10/19/2011	12:52:53 AM	H2 valve closed
10/19/2011	12:52:53 AM	BCl3 valve closed
10/19/2011	12:52:53 AM	PH3 valve closed
10/19/2011	12:52:53 AM	SiCl4 pre valve closed
10/19/2011	12:52:53 AM	SiCl4 post valve closed
10/19/2011	12:52:53 AM	Bypass valve closed
10/19/2011	12:52:53 AM	Bubbler valve closed
10/19/2011	12:52:53 AM	Main Vac valve opened
10/19/2011	12:52:53 AM	Helium MFC set to  0.000000
10/19/2011	12:52:53 AM	H2 MFC set to  0.000000
10/19/2011	12:52:53 AM	BCl3 MFC set to  0.000000
10/19/2011	12:52:53 AM	PHl3 MFC set to  0.000000
10/19/2011	12:52:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:52:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:52:53 AM	Tube furnace set to 150
10/19/2011	12:53:23 AM	H2 valve closed
10/19/2011	12:53:23 AM	BCl3 valve closed
10/19/2011	12:53:23 AM	PH3 valve closed
10/19/2011	12:53:23 AM	SiCl4 pre valve closed
10/19/2011	12:53:23 AM	SiCl4 post valve closed
10/19/2011	12:53:23 AM	Bypass valve closed
10/19/2011	12:53:23 AM	Bubbler valve closed
10/19/2011	12:53:23 AM	Helium valve opened
10/19/2011	12:53:23 AM	Main Vac valve opened
10/19/2011	12:53:23 AM	Helium MFC set to  20.000000
10/19/2011	12:53:23 AM	H2 MFC set to  0.000000
10/19/2011	12:53:23 AM	BCl3 MFC set to  0.000000
10/19/2011	12:53:23 AM	PHl3 MFC set to  0.000000
10/19/2011	12:53:23 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:53:23 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:53:23 AM	Tube furnace set to 150
10/19/2011	12:53:53 AM	Helium valve closed
10/19/2011	12:53:53 AM	H2 valve closed
10/19/2011	12:53:53 AM	BCl3 valve closed
10/19/2011	12:53:53 AM	PH3 valve closed
10/19/2011	12:53:53 AM	SiCl4 pre valve closed
10/19/2011	12:53:53 AM	SiCl4 post valve closed
10/19/2011	12:53:53 AM	Bypass valve closed
10/19/2011	12:53:53 AM	Bubbler valve closed
10/19/2011	12:53:53 AM	Main Vac valve opened
10/19/2011	12:53:53 AM	Helium MFC set to  0.000000
10/19/2011	12:53:53 AM	H2 MFC set to  0.000000
10/19/2011	12:53:53 AM	BCl3 MFC set to  0.000000
10/19/2011	12:53:53 AM	PHl3 MFC set to  0.000000
10/19/2011	12:53:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:53:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:53:53 AM	Tube furnace set to 150
10/19/2011	12:54:23 AM	H2 valve closed
10/19/2011	12:54:23 AM	BCl3 valve closed
10/19/2011	12:54:23 AM	PH3 valve closed
10/19/2011	12:54:23 AM	SiCl4 pre valve closed
10/19/2011	12:54:23 AM	SiCl4 post valve closed
10/19/2011	12:54:23 AM	Bypass valve closed
10/19/2011	12:54:23 AM	Bubbler valve closed
10/19/2011	12:54:23 AM	Helium valve opened
10/19/2011	12:54:23 AM	Main Vac valve opened
10/19/2011	12:54:23 AM	Helium MFC set to  20.000000
10/19/2011	12:54:23 AM	H2 MFC set to  0.000000
10/19/2011	12:54:23 AM	BCl3 MFC set to  0.000000
10/19/2011	12:54:23 AM	PHl3 MFC set to  0.000000
10/19/2011	12:54:23 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:54:23 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:54:23 AM	Tube furnace set to 150
10/19/2011	12:54:53 AM	Helium valve closed
10/19/2011	12:54:53 AM	H2 valve closed
10/19/2011	12:54:53 AM	BCl3 valve closed
10/19/2011	12:54:53 AM	PH3 valve closed
10/19/2011	12:54:53 AM	SiCl4 pre valve closed
10/19/2011	12:54:53 AM	SiCl4 post valve closed
10/19/2011	12:54:53 AM	Bypass valve closed
10/19/2011	12:54:53 AM	Bubbler valve closed
10/19/2011	12:54:53 AM	Main Vac valve opened
10/19/2011	12:54:53 AM	Helium MFC set to  0.000000
10/19/2011	12:54:53 AM	H2 MFC set to  0.000000
10/19/2011	12:54:53 AM	BCl3 MFC set to  0.000000
10/19/2011	12:54:53 AM	PHl3 MFC set to  0.000000
10/19/2011	12:54:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:54:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:54:54 AM	Tube furnace set to 150
10/19/2011	12:55:24 AM	H2 valve closed
10/19/2011	12:55:24 AM	BCl3 valve closed
10/19/2011	12:55:24 AM	PH3 valve closed
10/19/2011	12:55:24 AM	SiCl4 pre valve closed
10/19/2011	12:55:24 AM	SiCl4 post valve closed
10/19/2011	12:55:24 AM	Bypass valve closed
10/19/2011	12:55:24 AM	Bubbler valve closed
10/19/2011	12:55:24 AM	Helium valve opened
10/19/2011	12:55:24 AM	Main Vac valve opened
10/19/2011	12:55:24 AM	Helium MFC set to  20.000000
10/19/2011	12:55:24 AM	H2 MFC set to  0.000000
10/19/2011	12:55:24 AM	BCl3 MFC set to  0.000000
10/19/2011	12:55:24 AM	PHl3 MFC set to  0.000000
10/19/2011	12:55:24 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:55:24 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:55:24 AM	Tube furnace set to 150
10/19/2011	12:55:54 AM	Helium valve closed
10/19/2011	12:55:54 AM	H2 valve closed
10/19/2011	12:55:54 AM	BCl3 valve closed
10/19/2011	12:55:54 AM	PH3 valve closed
10/19/2011	12:55:54 AM	SiCl4 pre valve closed
10/19/2011	12:55:54 AM	SiCl4 post valve closed
10/19/2011	12:55:54 AM	Bypass valve closed
10/19/2011	12:55:54 AM	Bubbler valve closed
10/19/2011	12:55:54 AM	Main Vac valve opened
10/19/2011	12:55:54 AM	Helium MFC set to  0.000000
10/19/2011	12:55:54 AM	H2 MFC set to  0.000000
10/19/2011	12:55:54 AM	BCl3 MFC set to  0.000000
10/19/2011	12:55:54 AM	PHl3 MFC set to  0.000000
10/19/2011	12:55:54 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:55:54 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:55:54 AM	Tube furnace set to 150
10/19/2011	12:56:24 AM	H2 valve closed
10/19/2011	12:56:24 AM	BCl3 valve closed
10/19/2011	12:56:24 AM	PH3 valve closed
10/19/2011	12:56:24 AM	SiCl4 pre valve closed
10/19/2011	12:56:24 AM	SiCl4 post valve closed
10/19/2011	12:56:24 AM	Bypass valve closed
10/19/2011	12:56:24 AM	Bubbler valve closed
10/19/2011	12:56:24 AM	Helium valve opened
10/19/2011	12:56:24 AM	Main Vac valve opened
10/19/2011	12:56:24 AM	Helium MFC set to  20.000000
10/19/2011	12:56:24 AM	H2 MFC set to  0.000000
10/19/2011	12:56:24 AM	BCl3 MFC set to  0.000000
10/19/2011	12:56:24 AM	PHl3 MFC set to  0.000000
10/19/2011	12:56:24 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:56:24 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:56:24 AM	Tube furnace set to 150
10/19/2011	12:56:54 AM	Helium valve closed
10/19/2011	12:56:54 AM	H2 valve closed
10/19/2011	12:56:54 AM	BCl3 valve closed
10/19/2011	12:56:54 AM	PH3 valve closed
10/19/2011	12:56:54 AM	SiCl4 pre valve closed
10/19/2011	12:56:54 AM	SiCl4 post valve closed
10/19/2011	12:56:54 AM	Bypass valve closed
10/19/2011	12:56:54 AM	Bubbler valve closed
10/19/2011	12:56:54 AM	Main Vac valve opened
10/19/2011	12:56:54 AM	Helium MFC set to  0.000000
10/19/2011	12:56:54 AM	H2 MFC set to  0.000000
10/19/2011	12:56:54 AM	BCl3 MFC set to  0.000000
10/19/2011	12:56:54 AM	PHl3 MFC set to  0.000000
10/19/2011	12:56:54 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:56:54 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:56:54 AM	Tube furnace set to 150
10/19/2011	12:57:24 AM	H2 valve closed
10/19/2011	12:57:24 AM	BCl3 valve closed
10/19/2011	12:57:24 AM	PH3 valve closed
10/19/2011	12:57:24 AM	SiCl4 pre valve closed
10/19/2011	12:57:24 AM	SiCl4 post valve closed
10/19/2011	12:57:24 AM	Bypass valve closed
10/19/2011	12:57:24 AM	Bubbler valve closed
10/19/2011	12:57:24 AM	Helium valve opened
10/19/2011	12:57:24 AM	Main Vac valve opened
10/19/2011	12:57:24 AM	Helium MFC set to  20.000000
10/19/2011	12:57:24 AM	H2 MFC set to  0.000000
10/19/2011	12:57:24 AM	BCl3 MFC set to  0.000000
10/19/2011	12:57:24 AM	PHl3 MFC set to  0.000000
10/19/2011	12:57:24 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:57:24 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:57:25 AM	Tube furnace set to 150
10/19/2011	12:57:55 AM	Helium valve closed
10/19/2011	12:57:55 AM	H2 valve closed
10/19/2011	12:57:55 AM	BCl3 valve closed
10/19/2011	12:57:55 AM	PH3 valve closed
10/19/2011	12:57:55 AM	SiCl4 pre valve closed
10/19/2011	12:57:55 AM	SiCl4 post valve closed
10/19/2011	12:57:55 AM	Bypass valve closed
10/19/2011	12:57:55 AM	Bubbler valve closed
10/19/2011	12:57:55 AM	Main Vac valve opened
10/19/2011	12:57:55 AM	Helium MFC set to  0.000000
10/19/2011	12:57:55 AM	H2 MFC set to  0.000000
10/19/2011	12:57:55 AM	BCl3 MFC set to  0.000000
10/19/2011	12:57:55 AM	PHl3 MFC set to  0.000000
10/19/2011	12:57:55 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:57:55 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:57:55 AM	Tube furnace set to 150
10/19/2011	12:57:56 AM	Run finished at 12:57 AM
10/19/2011	12:58:23 AM	Main Vac valve closed
10/19/2011	12:58:30 AM	Main Vac valve opened
10/19/2011	12:58:38 AM	Recipe started at 12:58 AM
10/19/2011	12:58:38 AM	Helium valve closed
10/19/2011	12:58:38 AM	H2 valve closed
10/19/2011	12:58:38 AM	BCl3 valve closed
10/19/2011	12:58:38 AM	PH3 valve closed
10/19/2011	12:58:38 AM	SiCl4 pre valve closed
10/19/2011	12:58:38 AM	SiCl4 post valve closed
10/19/2011	12:58:38 AM	Bypass valve closed
10/19/2011	12:58:38 AM	Bubbler valve closed
10/19/2011	12:58:38 AM	Main Vac valve opened
10/19/2011	12:58:38 AM	Helium MFC set to  0.000000
10/19/2011	12:58:38 AM	H2 MFC set to  0.000000
10/19/2011	12:58:38 AM	BCl3 MFC set to  0.000000
10/19/2011	12:58:38 AM	PHl3 MFC set to  0.000000
10/19/2011	12:58:38 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:58:38 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:58:38 AM	Tube furnace set to 150
10/19/2011	12:59:08 AM	H2 valve closed
10/19/2011	12:59:08 AM	BCl3 valve closed
10/19/2011	12:59:08 AM	PH3 valve closed
10/19/2011	12:59:08 AM	SiCl4 pre valve closed
10/19/2011	12:59:08 AM	SiCl4 post valve closed
10/19/2011	12:59:08 AM	Bypass valve closed
10/19/2011	12:59:08 AM	Bubbler valve closed
10/19/2011	12:59:08 AM	Helium valve opened
10/19/2011	12:59:08 AM	Main Vac valve opened
10/19/2011	12:59:08 AM	Helium MFC set to  20.000000
10/19/2011	12:59:08 AM	H2 MFC set to  0.000000
10/19/2011	12:59:08 AM	BCl3 MFC set to  0.000000
10/19/2011	12:59:08 AM	PHl3 MFC set to  0.000000
10/19/2011	12:59:09 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:59:09 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:59:09 AM	Tube furnace set to 150
10/19/2011	12:59:39 AM	Helium valve closed
10/19/2011	12:59:39 AM	H2 valve closed
10/19/2011	12:59:39 AM	BCl3 valve closed
10/19/2011	12:59:39 AM	PH3 valve closed
10/19/2011	12:59:39 AM	SiCl4 pre valve closed
10/19/2011	12:59:39 AM	SiCl4 post valve closed
10/19/2011	12:59:39 AM	Bypass valve closed
10/19/2011	12:59:39 AM	Bubbler valve closed
10/19/2011	12:59:39 AM	Main Vac valve opened
10/19/2011	12:59:39 AM	Helium MFC set to  0.000000
10/19/2011	12:59:39 AM	H2 MFC set to  0.000000
10/19/2011	12:59:39 AM	BCl3 MFC set to  0.000000
10/19/2011	12:59:39 AM	PHl3 MFC set to  0.000000
10/19/2011	12:59:39 AM	SiCl4 MFC set to  0.000000
10/19/2011	12:59:39 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	12:59:39 AM	Tube furnace set to 150
10/19/2011	1:00:09 AM	H2 valve closed
10/19/2011	1:00:09 AM	BCl3 valve closed
10/19/2011	1:00:09 AM	PH3 valve closed
10/19/2011	1:00:09 AM	SiCl4 pre valve closed
10/19/2011	1:00:09 AM	SiCl4 post valve closed
10/19/2011	1:00:09 AM	Bypass valve closed
10/19/2011	1:00:09 AM	Bubbler valve closed
10/19/2011	1:00:09 AM	Helium valve opened
10/19/2011	1:00:09 AM	Main Vac valve opened
10/19/2011	1:00:09 AM	Helium MFC set to  20.000000
10/19/2011	1:00:09 AM	H2 MFC set to  0.000000
10/19/2011	1:00:09 AM	BCl3 MFC set to  0.000000
10/19/2011	1:00:09 AM	PHl3 MFC set to  0.000000
10/19/2011	1:00:09 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:00:09 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:00:09 AM	Tube furnace set to 150
10/19/2011	1:00:39 AM	Helium valve closed
10/19/2011	1:00:39 AM	H2 valve closed
10/19/2011	1:00:39 AM	BCl3 valve closed
10/19/2011	1:00:39 AM	PH3 valve closed
10/19/2011	1:00:39 AM	SiCl4 pre valve closed
10/19/2011	1:00:39 AM	SiCl4 post valve closed
10/19/2011	1:00:39 AM	Bypass valve closed
10/19/2011	1:00:39 AM	Bubbler valve closed
10/19/2011	1:00:39 AM	Main Vac valve opened
10/19/2011	1:00:39 AM	Helium MFC set to  0.000000
10/19/2011	1:00:39 AM	H2 MFC set to  0.000000
10/19/2011	1:00:39 AM	BCl3 MFC set to  0.000000
10/19/2011	1:00:39 AM	PHl3 MFC set to  0.000000
10/19/2011	1:00:39 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:00:39 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:00:39 AM	Tube furnace set to 150
10/19/2011	1:01:09 AM	H2 valve closed
10/19/2011	1:01:09 AM	BCl3 valve closed
10/19/2011	1:01:09 AM	PH3 valve closed
10/19/2011	1:01:09 AM	SiCl4 pre valve closed
10/19/2011	1:01:09 AM	SiCl4 post valve closed
10/19/2011	1:01:09 AM	Bypass valve closed
10/19/2011	1:01:09 AM	Bubbler valve closed
10/19/2011	1:01:09 AM	Helium valve opened
10/19/2011	1:01:09 AM	Main Vac valve opened
10/19/2011	1:01:09 AM	Helium MFC set to  20.000000
10/19/2011	1:01:09 AM	H2 MFC set to  0.000000
10/19/2011	1:01:09 AM	BCl3 MFC set to  0.000000
10/19/2011	1:01:09 AM	PHl3 MFC set to  0.000000
10/19/2011	1:01:09 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:01:09 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:01:09 AM	Tube furnace set to 150
10/19/2011	1:01:39 AM	Helium valve closed
10/19/2011	1:01:39 AM	H2 valve closed
10/19/2011	1:01:39 AM	BCl3 valve closed
10/19/2011	1:01:39 AM	PH3 valve closed
10/19/2011	1:01:39 AM	SiCl4 pre valve closed
10/19/2011	1:01:39 AM	SiCl4 post valve closed
10/19/2011	1:01:39 AM	Bypass valve closed
10/19/2011	1:01:39 AM	Bubbler valve closed
10/19/2011	1:01:39 AM	Main Vac valve opened
10/19/2011	1:01:39 AM	Helium MFC set to  0.000000
10/19/2011	1:01:39 AM	H2 MFC set to  0.000000
10/19/2011	1:01:39 AM	BCl3 MFC set to  0.000000
10/19/2011	1:01:39 AM	PHl3 MFC set to  0.000000
10/19/2011	1:01:39 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:01:39 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:01:40 AM	Tube furnace set to 150
10/19/2011	1:02:10 AM	H2 valve closed
10/19/2011	1:02:10 AM	BCl3 valve closed
10/19/2011	1:02:10 AM	PH3 valve closed
10/19/2011	1:02:10 AM	SiCl4 pre valve closed
10/19/2011	1:02:10 AM	SiCl4 post valve closed
10/19/2011	1:02:10 AM	Bypass valve closed
10/19/2011	1:02:10 AM	Bubbler valve closed
10/19/2011	1:02:10 AM	Helium valve opened
10/19/2011	1:02:10 AM	Main Vac valve opened
10/19/2011	1:02:10 AM	Helium MFC set to  20.000000
10/19/2011	1:02:10 AM	H2 MFC set to  0.000000
10/19/2011	1:02:10 AM	BCl3 MFC set to  0.000000
10/19/2011	1:02:10 AM	PHl3 MFC set to  0.000000
10/19/2011	1:02:10 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:02:10 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:02:10 AM	Tube furnace set to 150
10/19/2011	1:02:40 AM	Helium valve closed
10/19/2011	1:02:40 AM	H2 valve closed
10/19/2011	1:02:40 AM	BCl3 valve closed
10/19/2011	1:02:40 AM	PH3 valve closed
10/19/2011	1:02:40 AM	SiCl4 pre valve closed
10/19/2011	1:02:40 AM	SiCl4 post valve closed
10/19/2011	1:02:40 AM	Bypass valve closed
10/19/2011	1:02:40 AM	Bubbler valve closed
10/19/2011	1:02:40 AM	Main Vac valve opened
10/19/2011	1:02:40 AM	Helium MFC set to  0.000000
10/19/2011	1:02:40 AM	H2 MFC set to  0.000000
10/19/2011	1:02:40 AM	BCl3 MFC set to  0.000000
10/19/2011	1:02:40 AM	PHl3 MFC set to  0.000000
10/19/2011	1:02:40 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:02:40 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:02:40 AM	Tube furnace set to 150
10/19/2011	1:03:10 AM	H2 valve closed
10/19/2011	1:03:10 AM	BCl3 valve closed
10/19/2011	1:03:10 AM	PH3 valve closed
10/19/2011	1:03:10 AM	SiCl4 pre valve closed
10/19/2011	1:03:10 AM	SiCl4 post valve closed
10/19/2011	1:03:10 AM	Bypass valve closed
10/19/2011	1:03:10 AM	Bubbler valve closed
10/19/2011	1:03:10 AM	Helium valve opened
10/19/2011	1:03:10 AM	Main Vac valve opened
10/19/2011	1:03:10 AM	Helium MFC set to  20.000000
10/19/2011	1:03:10 AM	H2 MFC set to  0.000000
10/19/2011	1:03:10 AM	BCl3 MFC set to  0.000000
10/19/2011	1:03:10 AM	PHl3 MFC set to  0.000000
10/19/2011	1:03:10 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:03:10 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:03:10 AM	Tube furnace set to 150
10/19/2011	1:03:40 AM	Helium valve closed
10/19/2011	1:03:40 AM	H2 valve closed
10/19/2011	1:03:40 AM	BCl3 valve closed
10/19/2011	1:03:40 AM	PH3 valve closed
10/19/2011	1:03:40 AM	SiCl4 pre valve closed
10/19/2011	1:03:40 AM	SiCl4 post valve closed
10/19/2011	1:03:40 AM	Bypass valve closed
10/19/2011	1:03:40 AM	Bubbler valve closed
10/19/2011	1:03:40 AM	Main Vac valve opened
10/19/2011	1:03:40 AM	Helium MFC set to  0.000000
10/19/2011	1:03:40 AM	H2 MFC set to  0.000000
10/19/2011	1:03:40 AM	BCl3 MFC set to  0.000000
10/19/2011	1:03:40 AM	PHl3 MFC set to  0.000000
10/19/2011	1:03:40 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:03:40 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:03:40 AM	Tube furnace set to 150
10/19/2011	1:04:11 AM	H2 valve closed
10/19/2011	1:04:11 AM	BCl3 valve closed
10/19/2011	1:04:11 AM	PH3 valve closed
10/19/2011	1:04:11 AM	SiCl4 pre valve closed
10/19/2011	1:04:11 AM	SiCl4 post valve closed
10/19/2011	1:04:11 AM	Bypass valve closed
10/19/2011	1:04:11 AM	Bubbler valve closed
10/19/2011	1:04:11 AM	Helium valve opened
10/19/2011	1:04:11 AM	Main Vac valve opened
10/19/2011	1:04:11 AM	Helium MFC set to  20.000000
10/19/2011	1:04:11 AM	H2 MFC set to  0.000000
10/19/2011	1:04:11 AM	BCl3 MFC set to  0.000000
10/19/2011	1:04:11 AM	PHl3 MFC set to  0.000000
10/19/2011	1:04:11 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:04:11 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:04:11 AM	Tube furnace set to 150
10/19/2011	1:04:41 AM	Helium valve closed
10/19/2011	1:04:41 AM	H2 valve closed
10/19/2011	1:04:41 AM	BCl3 valve closed
10/19/2011	1:04:41 AM	PH3 valve closed
10/19/2011	1:04:41 AM	SiCl4 pre valve closed
10/19/2011	1:04:41 AM	SiCl4 post valve closed
10/19/2011	1:04:41 AM	Bypass valve closed
10/19/2011	1:04:41 AM	Bubbler valve closed
10/19/2011	1:04:41 AM	Main Vac valve opened
10/19/2011	1:04:41 AM	Helium MFC set to  0.000000
10/19/2011	1:04:41 AM	H2 MFC set to  0.000000
10/19/2011	1:04:41 AM	BCl3 MFC set to  0.000000
10/19/2011	1:04:41 AM	PHl3 MFC set to  0.000000
10/19/2011	1:04:41 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:04:41 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:04:41 AM	Tube furnace set to 150
10/19/2011	1:05:11 AM	H2 valve closed
10/19/2011	1:05:11 AM	BCl3 valve closed
10/19/2011	1:05:11 AM	PH3 valve closed
10/19/2011	1:05:11 AM	SiCl4 pre valve closed
10/19/2011	1:05:11 AM	SiCl4 post valve closed
10/19/2011	1:05:11 AM	Bypass valve closed
10/19/2011	1:05:11 AM	Bubbler valve closed
10/19/2011	1:05:11 AM	Helium valve opened
10/19/2011	1:05:11 AM	Main Vac valve opened
10/19/2011	1:05:11 AM	Helium MFC set to  20.000000
10/19/2011	1:05:11 AM	H2 MFC set to  0.000000
10/19/2011	1:05:11 AM	BCl3 MFC set to  0.000000
10/19/2011	1:05:11 AM	PHl3 MFC set to  0.000000
10/19/2011	1:05:11 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:05:11 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:05:11 AM	Tube furnace set to 150
10/19/2011	1:05:41 AM	Helium valve closed
10/19/2011	1:05:41 AM	H2 valve closed
10/19/2011	1:05:41 AM	BCl3 valve closed
10/19/2011	1:05:41 AM	PH3 valve closed
10/19/2011	1:05:41 AM	SiCl4 pre valve closed
10/19/2011	1:05:41 AM	SiCl4 post valve closed
10/19/2011	1:05:41 AM	Bypass valve closed
10/19/2011	1:05:41 AM	Bubbler valve closed
10/19/2011	1:05:41 AM	Main Vac valve opened
10/19/2011	1:05:41 AM	Helium MFC set to  0.000000
10/19/2011	1:05:41 AM	H2 MFC set to  0.000000
10/19/2011	1:05:41 AM	BCl3 MFC set to  0.000000
10/19/2011	1:05:41 AM	PHl3 MFC set to  0.000000
10/19/2011	1:05:41 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:05:41 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:05:41 AM	Tube furnace set to 150
10/19/2011	1:06:11 AM	H2 valve closed
10/19/2011	1:06:11 AM	BCl3 valve closed
10/19/2011	1:06:11 AM	PH3 valve closed
10/19/2011	1:06:11 AM	SiCl4 pre valve closed
10/19/2011	1:06:11 AM	SiCl4 post valve closed
10/19/2011	1:06:11 AM	Bypass valve closed
10/19/2011	1:06:11 AM	Bubbler valve closed
10/19/2011	1:06:11 AM	Helium valve opened
10/19/2011	1:06:11 AM	Main Vac valve opened
10/19/2011	1:06:11 AM	Helium MFC set to  20.000000
10/19/2011	1:06:11 AM	H2 MFC set to  0.000000
10/19/2011	1:06:11 AM	BCl3 MFC set to  0.000000
10/19/2011	1:06:11 AM	PHl3 MFC set to  0.000000
10/19/2011	1:06:11 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:06:11 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:06:12 AM	Tube furnace set to 150
10/19/2011	1:06:42 AM	Helium valve closed
10/19/2011	1:06:42 AM	H2 valve closed
10/19/2011	1:06:42 AM	BCl3 valve closed
10/19/2011	1:06:42 AM	PH3 valve closed
10/19/2011	1:06:42 AM	SiCl4 pre valve closed
10/19/2011	1:06:42 AM	SiCl4 post valve closed
10/19/2011	1:06:42 AM	Bypass valve closed
10/19/2011	1:06:42 AM	Bubbler valve closed
10/19/2011	1:06:42 AM	Main Vac valve opened
10/19/2011	1:06:42 AM	Helium MFC set to  0.000000
10/19/2011	1:06:42 AM	H2 MFC set to  0.000000
10/19/2011	1:06:42 AM	BCl3 MFC set to  0.000000
10/19/2011	1:06:42 AM	PHl3 MFC set to  0.000000
10/19/2011	1:06:42 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:06:42 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:06:42 AM	Tube furnace set to 150
10/19/2011	1:07:12 AM	H2 valve closed
10/19/2011	1:07:12 AM	BCl3 valve closed
10/19/2011	1:07:12 AM	PH3 valve closed
10/19/2011	1:07:12 AM	SiCl4 pre valve closed
10/19/2011	1:07:12 AM	SiCl4 post valve closed
10/19/2011	1:07:12 AM	Bypass valve closed
10/19/2011	1:07:12 AM	Bubbler valve closed
10/19/2011	1:07:12 AM	Helium valve opened
10/19/2011	1:07:12 AM	Main Vac valve opened
10/19/2011	1:07:12 AM	Helium MFC set to  20.000000
10/19/2011	1:07:12 AM	H2 MFC set to  0.000000
10/19/2011	1:07:12 AM	BCl3 MFC set to  0.000000
10/19/2011	1:07:12 AM	PHl3 MFC set to  0.000000
10/19/2011	1:07:12 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:07:12 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:07:12 AM	Tube furnace set to 150
10/19/2011	1:07:42 AM	Helium valve closed
10/19/2011	1:07:42 AM	H2 valve closed
10/19/2011	1:07:42 AM	BCl3 valve closed
10/19/2011	1:07:42 AM	PH3 valve closed
10/19/2011	1:07:42 AM	SiCl4 pre valve closed
10/19/2011	1:07:42 AM	SiCl4 post valve closed
10/19/2011	1:07:42 AM	Bypass valve closed
10/19/2011	1:07:42 AM	Bubbler valve closed
10/19/2011	1:07:42 AM	Main Vac valve opened
10/19/2011	1:07:42 AM	Helium MFC set to  0.000000
10/19/2011	1:07:42 AM	H2 MFC set to  0.000000
10/19/2011	1:07:42 AM	BCl3 MFC set to  0.000000
10/19/2011	1:07:42 AM	PHl3 MFC set to  0.000000
10/19/2011	1:07:42 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:07:42 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:07:42 AM	Tube furnace set to 150
10/19/2011	1:08:03 AM	Run aborted at 1:08 AM
10/19/2011	1:08:03 AM	Helium valve closed
10/19/2011	1:08:03 AM	H2 valve closed
10/19/2011	1:08:03 AM	BCl3 valve closed
10/19/2011	1:08:03 AM	PH3 valve closed
10/19/2011	1:08:03 AM	SiCl4 pre valve closed
10/19/2011	1:08:03 AM	SiCl4 post valve closed
10/19/2011	1:08:03 AM	Bypass valve closed
10/19/2011	1:08:03 AM	Main Vac valve closed
10/19/2011	1:08:03 AM	Bubbler valve closed
10/19/2011	1:08:03 AM	Helium MFC set to  0.000000
10/19/2011	1:08:03 AM	H2 MFC set to  0.000000
10/19/2011	1:08:03 AM	BCl3 MFC set to  0.000000
10/19/2011	1:08:03 AM	PHl3 MFC set to  0.000000
10/19/2011	1:08:03 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:08:03 AM	Tube furnace set to 0
10/19/2011	1:08:12 AM	Main Vac valve opened
10/19/2011	1:09:42 AM	Recipe started at 1:09 AM
10/19/2011	1:09:42 AM	Helium valve closed
10/19/2011	1:09:42 AM	H2 valve closed
10/19/2011	1:09:42 AM	BCl3 valve closed
10/19/2011	1:09:42 AM	PH3 valve closed
10/19/2011	1:09:42 AM	SiCl4 pre valve closed
10/19/2011	1:09:42 AM	SiCl4 post valve closed
10/19/2011	1:09:42 AM	Main Vac valve closed
10/19/2011	1:09:42 AM	Bypass valve closed
10/19/2011	1:09:42 AM	Bubbler valve closed
10/19/2011	1:09:42 AM	Helium MFC set to  0.000000
10/19/2011	1:09:42 AM	H2 MFC set to  0.000000
10/19/2011	1:09:42 AM	BCl3 MFC set to  0.000000
10/19/2011	1:09:42 AM	PHl3 MFC set to  0.000000
10/19/2011	1:09:42 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:09:42 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:09:42 AM	Tube furnace set to 0
10/19/2011	1:09:45 AM	Helium valve closed
10/19/2011	1:09:45 AM	BCl3 valve closed
10/19/2011	1:09:45 AM	PH3 valve closed
10/19/2011	1:09:45 AM	SiCl4 pre valve closed
10/19/2011	1:09:45 AM	SiCl4 post valve closed
10/19/2011	1:09:45 AM	Main Vac valve closed
10/19/2011	1:09:45 AM	Bypass valve closed
10/19/2011	1:09:45 AM	Bubbler valve closed
10/19/2011	1:09:45 AM	H2 valve opened
10/19/2011	1:09:45 AM	Helium MFC set to  0.000000
10/19/2011	1:09:45 AM	H2 MFC set to  500.000000
10/19/2011	1:09:45 AM	BCl3 MFC set to  0.000000
10/19/2011	1:09:45 AM	PHl3 MFC set to  0.000000
10/19/2011	1:09:45 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:09:45 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:09:45 AM	Tube furnace set to 0
10/19/2011	1:10:47 AM	Helium valve closed
10/19/2011	1:10:47 AM	BCl3 valve closed
10/19/2011	1:10:47 AM	PH3 valve closed
10/19/2011	1:10:47 AM	SiCl4 pre valve closed
10/19/2011	1:10:47 AM	SiCl4 post valve closed
10/19/2011	1:10:47 AM	Main Vac valve closed
10/19/2011	1:10:47 AM	Bypass valve closed
10/19/2011	1:10:47 AM	H2 valve opened
10/19/2011	1:10:47 AM	Bubbler valve opened
10/19/2011	1:10:47 AM	Helium MFC set to  0.000000
10/19/2011	1:10:47 AM	H2 MFC set to  500.000000
10/19/2011	1:10:47 AM	BCl3 MFC set to  0.000000
10/19/2011	1:10:47 AM	PHl3 MFC set to  0.000000
10/19/2011	1:10:47 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:10:47 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:10:47 AM	Tube furnace set to 0
10/19/2011	1:10:48 AM	Helium valve closed
10/19/2011	1:10:48 AM	BCl3 valve closed
10/19/2011	1:10:48 AM	PH3 valve closed
10/19/2011	1:10:48 AM	SiCl4 pre valve closed
10/19/2011	1:10:48 AM	SiCl4 post valve closed
10/19/2011	1:10:48 AM	Main Vac valve closed
10/19/2011	1:10:48 AM	Bypass valve closed
10/19/2011	1:10:48 AM	H2 valve opened
10/19/2011	1:10:48 AM	Bubbler valve opened
10/19/2011	1:10:48 AM	Helium MFC set to  0.000000
10/19/2011	1:10:48 AM	H2 MFC set to  500.000000
10/19/2011	1:10:48 AM	BCl3 MFC set to  0.000000
10/19/2011	1:10:48 AM	PHl3 MFC set to  0.000000
10/19/2011	1:10:48 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:10:48 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:10:48 AM	Tube furnace set to 1050
10/19/2011	1:30:48 AM	Helium valve closed
10/19/2011	1:30:48 AM	PH3 valve closed
10/19/2011	1:30:48 AM	Main Vac valve closed
10/19/2011	1:30:48 AM	Bypass valve closed
10/19/2011	1:30:48 AM	H2 valve opened
10/19/2011	1:30:48 AM	BCl3 valve opened
10/19/2011	1:30:48 AM	SiCl4 pre valve opened
10/19/2011	1:30:48 AM	SiCl4 post valve opened
10/19/2011	1:30:48 AM	Bubbler valve opened
10/19/2011	1:30:48 AM	Helium MFC set to  0.000000
10/19/2011	1:30:48 AM	H2 MFC set to  500.000000
10/19/2011	1:30:48 AM	BCl3 MFC set to  2.000000
10/19/2011	1:30:48 AM	PHl3 MFC set to  0.000000
10/19/2011	1:30:48 AM	SiCl4 MFC set to  50.000000
10/19/2011	1:30:48 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:30:48 AM	Tube furnace set to 1050
10/19/2011	1:40:48 AM	Helium valve closed
10/19/2011	1:40:48 AM	BCl3 valve closed
10/19/2011	1:40:48 AM	PH3 valve closed
10/19/2011	1:40:48 AM	SiCl4 pre valve closed
10/19/2011	1:40:48 AM	SiCl4 post valve closed
10/19/2011	1:40:48 AM	Main Vac valve closed
10/19/2011	1:40:48 AM	Bypass valve closed
10/19/2011	1:40:48 AM	H2 valve opened
10/19/2011	1:40:49 AM	Bubbler valve opened
10/19/2011	1:40:49 AM	Helium MFC set to  0.000000
10/19/2011	1:40:49 AM	H2 MFC set to  500.000000
10/19/2011	1:40:49 AM	BCl3 MFC set to  0.000000
10/19/2011	1:40:49 AM	PHl3 MFC set to  0.000000
10/19/2011	1:40:49 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:40:49 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:40:49 AM	Tube furnace set to 750
10/19/2011	1:45:49 AM	H2 valve closed
10/19/2011	1:45:49 AM	BCl3 valve closed
10/19/2011	1:45:49 AM	PH3 valve closed
10/19/2011	1:45:49 AM	SiCl4 pre valve closed
10/19/2011	1:45:49 AM	SiCl4 post valve closed
10/19/2011	1:45:49 AM	Main Vac valve closed
10/19/2011	1:45:49 AM	Bypass valve closed
10/19/2011	1:45:49 AM	Helium valve opened
10/19/2011	1:45:49 AM	Bubbler valve opened
10/19/2011	1:45:49 AM	Helium MFC set to  500.000000
10/19/2011	1:45:49 AM	H2 MFC set to  0.000000
10/19/2011	1:45:49 AM	BCl3 MFC set to  0.000000
10/19/2011	1:45:49 AM	PHl3 MFC set to  0.000000
10/19/2011	1:45:49 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:45:49 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:45:49 AM	Tube furnace set to 0
10/19/2011	1:47:41 AM	Helium valve closed
10/19/2011	1:47:41 AM	H2 valve closed
10/19/2011	1:47:41 AM	BCl3 valve closed
10/19/2011	1:47:41 AM	PH3 valve closed
10/19/2011	1:47:41 AM	SiCl4 pre valve closed
10/19/2011	1:47:41 AM	SiCl4 post valve closed
10/19/2011	1:47:41 AM	Main Vac valve closed
10/19/2011	1:47:41 AM	Bypass valve closed
10/19/2011	1:47:41 AM	Bubbler valve closed
10/19/2011	1:47:41 AM	Helium MFC set to  0.000000
10/19/2011	1:47:41 AM	H2 MFC set to  0.000000
10/19/2011	1:47:41 AM	BCl3 MFC set to  0.000000
10/19/2011	1:47:41 AM	PHl3 MFC set to  0.000000
10/19/2011	1:47:41 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:47:41 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:47:41 AM	Tube furnace set to 0
10/19/2011	1:47:42 AM	Run finished at 1:47 AM
10/19/2011	1:47:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	1:47:45 AM	Recipe started at 1:47 AM
10/19/2011	1:47:45 AM	Helium valve closed
10/19/2011	1:47:45 AM	H2 valve closed
10/19/2011	1:47:45 AM	BCl3 valve closed
10/19/2011	1:47:45 AM	PH3 valve closed
10/19/2011	1:47:45 AM	SiCl4 pre valve closed
10/19/2011	1:47:45 AM	SiCl4 post valve closed
10/19/2011	1:47:45 AM	Main Vac valve closed
10/19/2011	1:47:45 AM	Bypass valve closed
10/19/2011	1:47:45 AM	Bubbler valve closed
10/19/2011	1:47:45 AM	Helium MFC set to  0.000000
10/19/2011	1:47:46 AM	H2 MFC set to  0.000000
10/19/2011	1:47:46 AM	BCl3 MFC set to  0.000000
10/19/2011	1:47:46 AM	PHl3 MFC set to  0.000000
10/19/2011	1:47:46 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:47:46 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:47:46 AM	Tube furnace set to 0
10/19/2011	1:47:49 AM	H2 valve closed
10/19/2011	1:47:49 AM	BCl3 valve closed
10/19/2011	1:47:49 AM	PH3 valve closed
10/19/2011	1:47:49 AM	SiCl4 pre valve closed
10/19/2011	1:47:49 AM	SiCl4 post valve closed
10/19/2011	1:47:49 AM	Main Vac valve closed
10/19/2011	1:47:49 AM	Bypass valve closed
10/19/2011	1:47:49 AM	Bubbler valve closed
10/19/2011	1:47:49 AM	Helium valve opened
10/19/2011	1:47:49 AM	Helium MFC set to  500.000000
10/19/2011	1:47:49 AM	H2 MFC set to  0.000000
10/19/2011	1:47:49 AM	BCl3 MFC set to  0.000000
10/19/2011	1:47:49 AM	PHl3 MFC set to  0.000000
10/19/2011	1:47:49 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:47:49 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:47:49 AM	Tube furnace set to 0
10/19/2011	1:47:49 AM	Helium valve closed
10/19/2011	1:47:49 AM	H2 valve closed
10/19/2011	1:47:49 AM	BCl3 valve closed
10/19/2011	1:47:49 AM	PH3 valve closed
10/19/2011	1:47:49 AM	SiCl4 pre valve closed
10/19/2011	1:47:49 AM	SiCl4 post valve closed
10/19/2011	1:47:49 AM	Main Vac valve closed
10/19/2011	1:47:49 AM	Bypass valve closed
10/19/2011	1:47:49 AM	Bubbler valve closed
10/19/2011	1:47:49 AM	Helium MFC set to  0.000000
10/19/2011	1:47:49 AM	H2 MFC set to  0.000000
10/19/2011	1:47:49 AM	BCl3 MFC set to  0.000000
10/19/2011	1:47:49 AM	PHl3 MFC set to  0.000000
10/19/2011	1:47:49 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:47:49 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:47:49 AM	Tube furnace set to 0
10/19/2011	1:47:50 AM	Run finished at 1:47 AM
10/19/2011	1:47:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	1:57:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	1:57:16 AM	Recipe started at 1:57 AM
10/19/2011	1:57:16 AM	Helium valve closed
10/19/2011	1:57:16 AM	H2 valve closed
10/19/2011	1:57:16 AM	BCl3 valve closed
10/19/2011	1:57:16 AM	PH3 valve closed
10/19/2011	1:57:16 AM	SiCl4 pre valve closed
10/19/2011	1:57:16 AM	SiCl4 post valve closed
10/19/2011	1:57:16 AM	Main Vac valve closed
10/19/2011	1:57:16 AM	Bubbler valve closed
10/19/2011	1:57:16 AM	Bypass valve opened
10/19/2011	1:57:16 AM	Helium MFC set to  0.000000
10/19/2011	1:57:16 AM	H2 MFC set to  0.000000
10/19/2011	1:57:16 AM	BCl3 MFC set to  0.000000
10/19/2011	1:57:16 AM	PHl3 MFC set to  0.000000
10/19/2011	1:57:16 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:57:16 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:57:16 AM	Tube furnace set to 0
10/19/2011	1:58:02 AM	Run aborted at 1:58 AM
10/19/2011	1:58:02 AM	Helium valve closed
10/19/2011	1:58:02 AM	H2 valve closed
10/19/2011	1:58:02 AM	BCl3 valve closed
10/19/2011	1:58:02 AM	PH3 valve closed
10/19/2011	1:58:02 AM	SiCl4 pre valve closed
10/19/2011	1:58:02 AM	SiCl4 post valve closed
10/19/2011	1:58:02 AM	Bypass valve closed
10/19/2011	1:58:02 AM	Main Vac valve closed
10/19/2011	1:58:02 AM	Bubbler valve closed
10/19/2011	1:58:02 AM	Helium MFC set to  0.000000
10/19/2011	1:58:02 AM	H2 MFC set to  0.000000
10/19/2011	1:58:02 AM	BCl3 MFC set to  0.000000
10/19/2011	1:58:02 AM	PHl3 MFC set to  0.000000
10/19/2011	1:58:02 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:58:02 AM	Tube furnace set to 0
10/19/2011	1:58:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	1:58:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	1:58:35 AM	Recipe started at 1:58 AM
10/19/2011	1:58:35 AM	Helium valve closed
10/19/2011	1:58:35 AM	H2 valve closed
10/19/2011	1:58:35 AM	BCl3 valve closed
10/19/2011	1:58:35 AM	PH3 valve closed
10/19/2011	1:58:35 AM	SiCl4 pre valve closed
10/19/2011	1:58:35 AM	SiCl4 post valve closed
10/19/2011	1:58:35 AM	Main Vac valve closed
10/19/2011	1:58:35 AM	Bubbler valve closed
10/19/2011	1:58:35 AM	Bypass valve opened
10/19/2011	1:58:35 AM	Helium MFC set to  0.000000
10/19/2011	1:58:35 AM	H2 MFC set to  0.000000
10/19/2011	1:58:35 AM	BCl3 MFC set to  0.000000
10/19/2011	1:58:35 AM	PHl3 MFC set to  0.000000
10/19/2011	1:58:35 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:58:35 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:58:35 AM	Tube furnace set to 0
10/19/2011	1:59:53 AM	Helium valve closed
10/19/2011	1:59:53 AM	H2 valve closed
10/19/2011	1:59:53 AM	BCl3 valve closed
10/19/2011	1:59:53 AM	PH3 valve closed
10/19/2011	1:59:53 AM	SiCl4 pre valve closed
10/19/2011	1:59:53 AM	SiCl4 post valve closed
10/19/2011	1:59:53 AM	Main Vac valve closed
10/19/2011	1:59:53 AM	Bubbler valve closed
10/19/2011	1:59:53 AM	Bypass valve opened
10/19/2011	1:59:53 AM	Helium MFC set to  0.000000
10/19/2011	1:59:53 AM	H2 MFC set to  0.000000
10/19/2011	1:59:53 AM	BCl3 MFC set to  0.000000
10/19/2011	1:59:53 AM	PHl3 MFC set to  0.000000
10/19/2011	1:59:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	1:59:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	1:59:53 AM	Tube furnace set to 0
10/19/2011	2:00:53 AM	Helium valve closed
10/19/2011	2:00:53 AM	H2 valve closed
10/19/2011	2:00:53 AM	BCl3 valve closed
10/19/2011	2:00:53 AM	PH3 valve closed
10/19/2011	2:00:53 AM	SiCl4 pre valve closed
10/19/2011	2:00:53 AM	SiCl4 post valve closed
10/19/2011	2:00:53 AM	Bypass valve closed
10/19/2011	2:00:53 AM	Bubbler valve closed
10/19/2011	2:00:53 AM	Main Vac valve opened
10/19/2011	2:00:53 AM	Helium MFC set to  0.000000
10/19/2011	2:00:53 AM	H2 MFC set to  0.000000
10/19/2011	2:00:53 AM	BCl3 MFC set to  0.000000
10/19/2011	2:00:53 AM	PHl3 MFC set to  0.000000
10/19/2011	2:00:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	2:00:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	2:00:53 AM	Tube furnace set to 0
10/19/2011	2:00:54 AM	Run finished at 2:00 AM
10/19/2011	2:00:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	10:34:33 AM	Program exited cleanly
10/19/2011	11:03:11 AM	Program started normally
10/19/2011	11:03:11 AM	Helium valve closed
10/19/2011	11:03:11 AM	H2 valve closed
10/19/2011	11:03:11 AM	BCl3 valve closed
10/19/2011	11:03:11 AM	PH3 valve closed
10/19/2011	11:03:11 AM	SiCl4 pre valve closed
10/19/2011	11:03:11 AM	SiCl4 post valve closed
10/19/2011	11:03:11 AM	Main Vac valve closed
10/19/2011	11:03:11 AM	Bypass valve closed
10/19/2011	11:03:11 AM	Bubbler valve closed
10/19/2011	11:03:11 AM	Helium MFC set to  0.000000
10/19/2011	11:03:11 AM	H2 MFC set to  0.000000
10/19/2011	11:03:11 AM	BCl3 MFC set to  0.000000
10/19/2011	11:03:11 AM	PHl3 MFC set to  0.000000
10/19/2011	11:03:11 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:03:11 AM	Bypass solenoid MFC set to  760.000000
10/19/2011	11:03:11 AM	Tube furnace set to 0
10/19/2011	11:03:13 AM	Main Vac valve opened
10/19/2011	11:03:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	11:03:20 AM	Recipe started at 11:03 AM
10/19/2011	11:03:20 AM	Helium valve closed
10/19/2011	11:03:20 AM	H2 valve closed
10/19/2011	11:03:20 AM	BCl3 valve closed
10/19/2011	11:03:20 AM	PH3 valve closed
10/19/2011	11:03:20 AM	SiCl4 pre valve closed
10/19/2011	11:03:20 AM	SiCl4 post valve closed
10/19/2011	11:03:20 AM	Main Vac valve closed
10/19/2011	11:03:20 AM	Bypass valve closed
10/19/2011	11:03:20 AM	Bubbler valve closed
10/19/2011	11:03:20 AM	Helium MFC set to  0.000000
10/19/2011	11:03:20 AM	H2 MFC set to  0.000000
10/19/2011	11:03:20 AM	BCl3 MFC set to  0.000000
10/19/2011	11:03:20 AM	PHl3 MFC set to  0.000000
10/19/2011	11:03:20 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:03:20 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:03:20 AM	Tube furnace set to 0
10/19/2011	11:03:23 AM	H2 valve closed
10/19/2011	11:03:23 AM	BCl3 valve closed
10/19/2011	11:03:23 AM	PH3 valve closed
10/19/2011	11:03:23 AM	SiCl4 pre valve closed
10/19/2011	11:03:23 AM	SiCl4 post valve closed
10/19/2011	11:03:23 AM	Main Vac valve closed
10/19/2011	11:03:23 AM	Bypass valve closed
10/19/2011	11:03:23 AM	Bubbler valve closed
10/19/2011	11:03:23 AM	Helium valve opened
10/19/2011	11:03:23 AM	Helium MFC set to  500.000000
10/19/2011	11:03:23 AM	H2 MFC set to  0.000000
10/19/2011	11:03:23 AM	BCl3 MFC set to  0.000000
10/19/2011	11:03:23 AM	PHl3 MFC set to  0.000000
10/19/2011	11:03:23 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:03:23 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:03:24 AM	Tube furnace set to 0
10/19/2011	11:04:30 AM	Helium valve closed
10/19/2011	11:04:30 AM	H2 valve closed
10/19/2011	11:04:30 AM	BCl3 valve closed
10/19/2011	11:04:30 AM	PH3 valve closed
10/19/2011	11:04:30 AM	SiCl4 pre valve closed
10/19/2011	11:04:30 AM	SiCl4 post valve closed
10/19/2011	11:04:30 AM	Main Vac valve closed
10/19/2011	11:04:30 AM	Bypass valve closed
10/19/2011	11:04:30 AM	Bubbler valve closed
10/19/2011	11:04:30 AM	Helium MFC set to  0.000000
10/19/2011	11:04:30 AM	H2 MFC set to  0.000000
10/19/2011	11:04:30 AM	BCl3 MFC set to  0.000000
10/19/2011	11:04:30 AM	PHl3 MFC set to  0.000000
10/19/2011	11:04:30 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:04:30 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:04:30 AM	Tube furnace set to 0
10/19/2011	11:04:31 AM	Run finished at 11:04 AM
10/19/2011	11:04:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/19/2011	11:10:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:10:53 AM	Recipe started at 11:10 AM
10/19/2011	11:10:53 AM	Helium valve closed
10/19/2011	11:10:53 AM	H2 valve closed
10/19/2011	11:10:53 AM	BCl3 valve closed
10/19/2011	11:10:53 AM	PH3 valve closed
10/19/2011	11:10:53 AM	SiCl4 pre valve closed
10/19/2011	11:10:53 AM	SiCl4 post valve closed
10/19/2011	11:10:53 AM	Main Vac valve closed
10/19/2011	11:10:53 AM	Bubbler valve closed
10/19/2011	11:10:53 AM	Bypass valve opened
10/19/2011	11:10:53 AM	Helium MFC set to  0.000000
10/19/2011	11:10:53 AM	H2 MFC set to  0.000000
10/19/2011	11:10:53 AM	BCl3 MFC set to  0.000000
10/19/2011	11:10:53 AM	PHl3 MFC set to  0.000000
10/19/2011	11:10:53 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:10:53 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:10:54 AM	Tube furnace set to 0
10/19/2011	11:12:13 AM	Helium valve closed
10/19/2011	11:12:13 AM	H2 valve closed
10/19/2011	11:12:13 AM	BCl3 valve closed
10/19/2011	11:12:13 AM	PH3 valve closed
10/19/2011	11:12:13 AM	SiCl4 pre valve closed
10/19/2011	11:12:13 AM	SiCl4 post valve closed
10/19/2011	11:12:13 AM	Main Vac valve closed
10/19/2011	11:12:13 AM	Bubbler valve closed
10/19/2011	11:12:13 AM	Bypass valve opened
10/19/2011	11:12:13 AM	Helium MFC set to  0.000000
10/19/2011	11:12:13 AM	H2 MFC set to  0.000000
10/19/2011	11:12:13 AM	BCl3 MFC set to  0.000000
10/19/2011	11:12:13 AM	PHl3 MFC set to  0.000000
10/19/2011	11:12:13 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:12:13 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:12:13 AM	Tube furnace set to 0
10/19/2011	11:13:13 AM	Helium valve closed
10/19/2011	11:13:13 AM	H2 valve closed
10/19/2011	11:13:13 AM	BCl3 valve closed
10/19/2011	11:13:13 AM	PH3 valve closed
10/19/2011	11:13:13 AM	SiCl4 pre valve closed
10/19/2011	11:13:13 AM	SiCl4 post valve closed
10/19/2011	11:13:13 AM	Bypass valve closed
10/19/2011	11:13:13 AM	Bubbler valve closed
10/19/2011	11:13:13 AM	Main Vac valve opened
10/19/2011	11:13:13 AM	Helium MFC set to  0.000000
10/19/2011	11:13:13 AM	H2 MFC set to  0.000000
10/19/2011	11:13:13 AM	BCl3 MFC set to  0.000000
10/19/2011	11:13:13 AM	PHl3 MFC set to  0.000000
10/19/2011	11:13:13 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:13:13 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:13:14 AM	Tube furnace set to 0
10/19/2011	11:13:15 AM	Run finished at 11:13 AM
10/19/2011	11:13:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:18:31 AM	Main Vac valve closed
10/19/2011	11:24:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:24:01 AM	Recipe started at 11:24 AM
10/19/2011	11:24:01 AM	Helium valve closed
10/19/2011	11:24:01 AM	H2 valve closed
10/19/2011	11:24:01 AM	BCl3 valve closed
10/19/2011	11:24:01 AM	PH3 valve closed
10/19/2011	11:24:01 AM	SiCl4 pre valve closed
10/19/2011	11:24:01 AM	SiCl4 post valve closed
10/19/2011	11:24:01 AM	Main Vac valve closed
10/19/2011	11:24:01 AM	Bubbler valve closed
10/19/2011	11:24:01 AM	Bypass valve opened
10/19/2011	11:24:01 AM	Helium MFC set to  0.000000
10/19/2011	11:24:01 AM	H2 MFC set to  0.000000
10/19/2011	11:24:02 AM	BCl3 MFC set to  0.000000
10/19/2011	11:24:02 AM	PHl3 MFC set to  0.000000
10/19/2011	11:24:02 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:24:02 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:24:02 AM	Tube furnace set to 0
10/19/2011	11:26:12 AM	Helium valve closed
10/19/2011	11:26:12 AM	H2 valve closed
10/19/2011	11:26:12 AM	BCl3 valve closed
10/19/2011	11:26:12 AM	PH3 valve closed
10/19/2011	11:26:12 AM	SiCl4 pre valve closed
10/19/2011	11:26:12 AM	SiCl4 post valve closed
10/19/2011	11:26:12 AM	Main Vac valve closed
10/19/2011	11:26:12 AM	Bubbler valve closed
10/19/2011	11:26:12 AM	Bypass valve opened
10/19/2011	11:26:12 AM	Helium MFC set to  0.000000
10/19/2011	11:26:12 AM	H2 MFC set to  0.000000
10/19/2011	11:26:12 AM	BCl3 MFC set to  0.000000
10/19/2011	11:26:12 AM	PHl3 MFC set to  0.000000
10/19/2011	11:26:12 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:26:12 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:26:12 AM	Tube furnace set to 0
10/19/2011	11:27:01 AM	Helium valve closed
10/19/2011	11:27:01 AM	H2 valve closed
10/19/2011	11:27:01 AM	BCl3 valve closed
10/19/2011	11:27:01 AM	PH3 valve closed
10/19/2011	11:27:01 AM	SiCl4 pre valve closed
10/19/2011	11:27:01 AM	SiCl4 post valve closed
10/19/2011	11:27:01 AM	Bypass valve closed
10/19/2011	11:27:01 AM	Bubbler valve closed
10/19/2011	11:27:01 AM	Main Vac valve opened
10/19/2011	11:27:01 AM	Helium MFC set to  0.000000
10/19/2011	11:27:01 AM	H2 MFC set to  0.000000
10/19/2011	11:27:01 AM	BCl3 MFC set to  0.000000
10/19/2011	11:27:01 AM	PHl3 MFC set to  0.000000
10/19/2011	11:27:01 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:27:01 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:27:01 AM	Tube furnace set to 0
10/19/2011	11:27:02 AM	Run finished at 11:27 AM
10/19/2011	11:27:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:27:20 AM	Main Vac valve closed
10/19/2011	11:31:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:31:01 AM	Recipe started at 11:31 AM
10/19/2011	11:31:01 AM	Helium valve closed
10/19/2011	11:31:01 AM	H2 valve closed
10/19/2011	11:31:01 AM	BCl3 valve closed
10/19/2011	11:31:01 AM	PH3 valve closed
10/19/2011	11:31:01 AM	SiCl4 pre valve closed
10/19/2011	11:31:01 AM	SiCl4 post valve closed
10/19/2011	11:31:01 AM	Main Vac valve closed
10/19/2011	11:31:01 AM	Bubbler valve closed
10/19/2011	11:31:01 AM	Bypass valve opened
10/19/2011	11:31:01 AM	Helium MFC set to  0.000000
10/19/2011	11:31:01 AM	H2 MFC set to  0.000000
10/19/2011	11:31:01 AM	BCl3 MFC set to  0.000000
10/19/2011	11:31:01 AM	PHl3 MFC set to  0.000000
10/19/2011	11:31:01 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:31:01 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:31:01 AM	Tube furnace set to 0
10/19/2011	11:33:11 AM	Helium valve closed
10/19/2011	11:33:11 AM	H2 valve closed
10/19/2011	11:33:11 AM	BCl3 valve closed
10/19/2011	11:33:11 AM	PH3 valve closed
10/19/2011	11:33:11 AM	SiCl4 pre valve closed
10/19/2011	11:33:11 AM	SiCl4 post valve closed
10/19/2011	11:33:11 AM	Main Vac valve closed
10/19/2011	11:33:11 AM	Bubbler valve closed
10/19/2011	11:33:11 AM	Bypass valve opened
10/19/2011	11:33:11 AM	Helium MFC set to  0.000000
10/19/2011	11:33:11 AM	H2 MFC set to  0.000000
10/19/2011	11:33:11 AM	BCl3 MFC set to  0.000000
10/19/2011	11:33:11 AM	PHl3 MFC set to  0.000000
10/19/2011	11:33:11 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:33:11 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:33:11 AM	Tube furnace set to 0
10/19/2011	11:33:34 AM	Helium valve closed
10/19/2011	11:33:34 AM	H2 valve closed
10/19/2011	11:33:34 AM	BCl3 valve closed
10/19/2011	11:33:34 AM	PH3 valve closed
10/19/2011	11:33:34 AM	SiCl4 pre valve closed
10/19/2011	11:33:34 AM	SiCl4 post valve closed
10/19/2011	11:33:34 AM	Bypass valve closed
10/19/2011	11:33:34 AM	Bubbler valve closed
10/19/2011	11:33:34 AM	Main Vac valve opened
10/19/2011	11:33:34 AM	Helium MFC set to  0.000000
10/19/2011	11:33:34 AM	H2 MFC set to  0.000000
10/19/2011	11:33:34 AM	BCl3 MFC set to  0.000000
10/19/2011	11:33:34 AM	PHl3 MFC set to  0.000000
10/19/2011	11:33:34 AM	SiCl4 MFC set to  0.000000
10/19/2011	11:33:34 AM	Bypass solenoid MFC set to  0.000000
10/19/2011	11:33:34 AM	Tube furnace set to 0
10/19/2011	11:33:35 AM	Run finished at 11:33 AM
10/19/2011	11:33:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	11:36:22 AM	Main Vac valve closed
10/19/2011	11:36:30 AM	Main Vac valve opened
10/19/2011	3:19:02 PM	Main Vac valve closed
10/19/2011	3:19:11 PM	Main Vac valve opened
10/19/2011	3:19:20 PM	Main Vac valve closed
10/19/2011	3:19:34 PM	Main Vac valve opened
10/19/2011	3:20:32 PM	Recipe started at 3:20 PM
10/19/2011	3:20:32 PM	Helium valve closed
10/19/2011	3:20:32 PM	H2 valve closed
10/19/2011	3:20:32 PM	BCl3 valve closed
10/19/2011	3:20:32 PM	PH3 valve closed
10/19/2011	3:20:32 PM	SiCl4 pre valve closed
10/19/2011	3:20:32 PM	SiCl4 post valve closed
10/19/2011	3:20:32 PM	Main Vac valve closed
10/19/2011	3:20:32 PM	Bypass valve closed
10/19/2011	3:20:32 PM	Bubbler valve closed
10/19/2011	3:20:32 PM	Helium MFC set to  0.000000
10/19/2011	3:20:32 PM	H2 MFC set to  0.000000
10/19/2011	3:20:32 PM	BCl3 MFC set to  0.000000
10/19/2011	3:20:32 PM	PHl3 MFC set to  0.000000
10/19/2011	3:20:32 PM	SiCl4 MFC set to  0.000000
10/19/2011	3:20:32 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	3:20:32 PM	Tube furnace set to 0
10/19/2011	3:20:35 PM	Helium valve closed
10/19/2011	3:20:35 PM	BCl3 valve closed
10/19/2011	3:20:35 PM	PH3 valve closed
10/19/2011	3:20:35 PM	SiCl4 pre valve closed
10/19/2011	3:20:35 PM	SiCl4 post valve closed
10/19/2011	3:20:35 PM	Main Vac valve closed
10/19/2011	3:20:35 PM	Bypass valve closed
10/19/2011	3:20:35 PM	Bubbler valve closed
10/19/2011	3:20:35 PM	H2 valve opened
10/19/2011	3:20:35 PM	Helium MFC set to  0.000000
10/19/2011	3:20:35 PM	H2 MFC set to  500.000000
10/19/2011	3:20:35 PM	BCl3 MFC set to  0.000000
10/19/2011	3:20:35 PM	PHl3 MFC set to  0.000000
10/19/2011	3:20:35 PM	SiCl4 MFC set to  0.000000
10/19/2011	3:20:35 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	3:20:35 PM	Tube furnace set to 0
10/19/2011	3:21:43 PM	Helium valve closed
10/19/2011	3:21:43 PM	BCl3 valve closed
10/19/2011	3:21:43 PM	PH3 valve closed
10/19/2011	3:21:43 PM	SiCl4 pre valve closed
10/19/2011	3:21:43 PM	SiCl4 post valve closed
10/19/2011	3:21:43 PM	Main Vac valve closed
10/19/2011	3:21:43 PM	Bypass valve closed
10/19/2011	3:21:43 PM	H2 valve opened
10/19/2011	3:21:43 PM	Bubbler valve opened
10/19/2011	3:21:43 PM	Helium MFC set to  0.000000
10/19/2011	3:21:43 PM	H2 MFC set to  500.000000
10/19/2011	3:21:43 PM	BCl3 MFC set to  0.000000
10/19/2011	3:21:43 PM	PHl3 MFC set to  0.000000
10/19/2011	3:21:43 PM	SiCl4 MFC set to  0.000000
10/19/2011	3:21:43 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	3:21:43 PM	Tube furnace set to 0
10/19/2011	3:21:44 PM	Helium valve closed
10/19/2011	3:21:44 PM	BCl3 valve closed
10/19/2011	3:21:44 PM	PH3 valve closed
10/19/2011	3:21:44 PM	SiCl4 pre valve closed
10/19/2011	3:21:44 PM	SiCl4 post valve closed
10/19/2011	3:21:44 PM	Main Vac valve closed
10/19/2011	3:21:44 PM	Bypass valve closed
10/19/2011	3:21:44 PM	H2 valve opened
10/19/2011	3:21:44 PM	Bubbler valve opened
10/19/2011	3:21:44 PM	Helium MFC set to  0.000000
10/19/2011	3:21:44 PM	H2 MFC set to  500.000000
10/19/2011	3:21:44 PM	BCl3 MFC set to  0.000000
10/19/2011	3:21:44 PM	PHl3 MFC set to  0.000000
10/19/2011	3:21:44 PM	SiCl4 MFC set to  0.000000
10/19/2011	3:21:44 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	3:21:44 PM	Tube furnace set to 1000
10/19/2011	3:41:44 PM	Helium valve closed
10/19/2011	3:41:44 PM	BCl3 valve closed
10/19/2011	3:41:44 PM	PH3 valve closed
10/19/2011	3:41:44 PM	Main Vac valve closed
10/19/2011	3:41:44 PM	Bypass valve closed
10/19/2011	3:41:44 PM	H2 valve opened
10/19/2011	3:41:44 PM	SiCl4 pre valve opened
10/19/2011	3:41:44 PM	SiCl4 post valve opened
10/19/2011	3:41:44 PM	Bubbler valve opened
10/19/2011	3:41:44 PM	Helium MFC set to  0.000000
10/19/2011	3:41:44 PM	H2 MFC set to  500.000000
10/19/2011	3:41:44 PM	BCl3 MFC set to  0.000000
10/19/2011	3:41:44 PM	PHl3 MFC set to  0.000000
10/19/2011	3:41:44 PM	SiCl4 MFC set to  50.000000
10/19/2011	3:41:44 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	3:41:44 PM	Tube furnace set to 1000
10/19/2011	4:01:44 PM	Helium valve closed
10/19/2011	4:01:44 PM	BCl3 valve closed
10/19/2011	4:01:44 PM	PH3 valve closed
10/19/2011	4:01:44 PM	SiCl4 pre valve closed
10/19/2011	4:01:44 PM	SiCl4 post valve closed
10/19/2011	4:01:44 PM	Main Vac valve closed
10/19/2011	4:01:44 PM	Bypass valve closed
10/19/2011	4:01:44 PM	H2 valve opened
10/19/2011	4:01:44 PM	Bubbler valve opened
10/19/2011	4:01:44 PM	Helium MFC set to  0.000000
10/19/2011	4:01:44 PM	H2 MFC set to  500.000000
10/19/2011	4:01:44 PM	BCl3 MFC set to  0.000000
10/19/2011	4:01:44 PM	PHl3 MFC set to  0.000000
10/19/2011	4:01:44 PM	SiCl4 MFC set to  0.000000
10/19/2011	4:01:44 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	4:01:44 PM	Tube furnace set to 950
10/19/2011	4:06:44 PM	Helium valve closed
10/19/2011	4:06:44 PM	BCl3 valve closed
10/19/2011	4:06:44 PM	PH3 valve closed
10/19/2011	4:06:44 PM	SiCl4 pre valve closed
10/19/2011	4:06:44 PM	SiCl4 post valve closed
10/19/2011	4:06:44 PM	Main Vac valve closed
10/19/2011	4:06:44 PM	Bypass valve closed
10/19/2011	4:06:45 PM	H2 valve opened
10/19/2011	4:06:45 PM	Bubbler valve opened
10/19/2011	4:06:45 PM	Helium MFC set to  0.000000
10/19/2011	4:06:45 PM	H2 MFC set to  500.000000
10/19/2011	4:06:45 PM	BCl3 MFC set to  0.000000
10/19/2011	4:06:45 PM	PHl3 MFC set to  0.000000
10/19/2011	4:06:45 PM	SiCl4 MFC set to  0.000000
10/19/2011	4:06:45 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	4:06:45 PM	Tube furnace set to 850
10/19/2011	4:08:33 PM	H2 valve closed
10/19/2011	4:08:33 PM	BCl3 valve closed
10/19/2011	4:08:33 PM	PH3 valve closed
10/19/2011	4:08:33 PM	SiCl4 pre valve closed
10/19/2011	4:08:33 PM	SiCl4 post valve closed
10/19/2011	4:08:33 PM	Main Vac valve closed
10/19/2011	4:08:33 PM	Bypass valve closed
10/19/2011	4:08:33 PM	Helium valve opened
10/19/2011	4:08:33 PM	Bubbler valve opened
10/19/2011	4:08:33 PM	Helium MFC set to  500.000000
10/19/2011	4:08:33 PM	H2 MFC set to  0.000000
10/19/2011	4:08:33 PM	BCl3 MFC set to  0.000000
10/19/2011	4:08:33 PM	PHl3 MFC set to  0.000000
10/19/2011	4:08:33 PM	SiCl4 MFC set to  0.000000
10/19/2011	4:08:33 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	4:08:33 PM	Tube furnace set to 0
10/19/2011	4:48:33 PM	Helium valve closed
10/19/2011	4:48:33 PM	H2 valve closed
10/19/2011	4:48:33 PM	BCl3 valve closed
10/19/2011	4:48:33 PM	PH3 valve closed
10/19/2011	4:48:33 PM	SiCl4 pre valve closed
10/19/2011	4:48:33 PM	SiCl4 post valve closed
10/19/2011	4:48:33 PM	Main Vac valve closed
10/19/2011	4:48:33 PM	Bypass valve closed
10/19/2011	4:48:33 PM	Bubbler valve closed
10/19/2011	4:48:33 PM	Helium MFC set to  0.000000
10/19/2011	4:48:33 PM	H2 MFC set to  0.000000
10/19/2011	4:48:33 PM	BCl3 MFC set to  0.000000
10/19/2011	4:48:33 PM	PHl3 MFC set to  0.000000
10/19/2011	4:48:33 PM	SiCl4 MFC set to  0.000000
10/19/2011	4:48:33 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	4:48:33 PM	Tube furnace set to 0
10/19/2011	4:48:34 PM	Run finished at 4:48 PM
10/19/2011	5:02:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	5:02:16 PM	Recipe started at 5:02 PM
10/19/2011	5:02:16 PM	Helium valve closed
10/19/2011	5:02:16 PM	H2 valve closed
10/19/2011	5:02:16 PM	BCl3 valve closed
10/19/2011	5:02:16 PM	PH3 valve closed
10/19/2011	5:02:16 PM	SiCl4 pre valve closed
10/19/2011	5:02:16 PM	SiCl4 post valve closed
10/19/2011	5:02:16 PM	Main Vac valve closed
10/19/2011	5:02:16 PM	Bubbler valve closed
10/19/2011	5:02:16 PM	Bypass valve opened
10/19/2011	5:02:16 PM	Helium MFC set to  0.000000
10/19/2011	5:02:16 PM	H2 MFC set to  0.000000
10/19/2011	5:02:16 PM	BCl3 MFC set to  0.000000
10/19/2011	5:02:16 PM	PHl3 MFC set to  0.000000
10/19/2011	5:02:16 PM	SiCl4 MFC set to  0.000000
10/19/2011	5:02:16 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	5:02:16 PM	Tube furnace set to 0
10/19/2011	5:03:41 PM	Helium valve closed
10/19/2011	5:03:41 PM	H2 valve closed
10/19/2011	5:03:41 PM	BCl3 valve closed
10/19/2011	5:03:41 PM	PH3 valve closed
10/19/2011	5:03:41 PM	SiCl4 pre valve closed
10/19/2011	5:03:41 PM	SiCl4 post valve closed
10/19/2011	5:03:41 PM	Main Vac valve closed
10/19/2011	5:03:41 PM	Bubbler valve closed
10/19/2011	5:03:41 PM	Bypass valve opened
10/19/2011	5:03:41 PM	Helium MFC set to  0.000000
10/19/2011	5:03:41 PM	H2 MFC set to  0.000000
10/19/2011	5:03:41 PM	BCl3 MFC set to  0.000000
10/19/2011	5:03:41 PM	PHl3 MFC set to  0.000000
10/19/2011	5:03:41 PM	SiCl4 MFC set to  0.000000
10/19/2011	5:03:41 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	5:03:41 PM	Tube furnace set to 0
10/19/2011	5:03:44 PM	Helium valve closed
10/19/2011	5:03:44 PM	H2 valve closed
10/19/2011	5:03:44 PM	BCl3 valve closed
10/19/2011	5:03:44 PM	PH3 valve closed
10/19/2011	5:03:44 PM	SiCl4 pre valve closed
10/19/2011	5:03:44 PM	SiCl4 post valve closed
10/19/2011	5:03:44 PM	Bypass valve closed
10/19/2011	5:03:44 PM	Bubbler valve closed
10/19/2011	5:03:44 PM	Main Vac valve opened
10/19/2011	5:03:44 PM	Helium MFC set to  0.000000
10/19/2011	5:03:44 PM	H2 MFC set to  0.000000
10/19/2011	5:03:44 PM	BCl3 MFC set to  0.000000
10/19/2011	5:03:44 PM	PHl3 MFC set to  0.000000
10/19/2011	5:03:44 PM	SiCl4 MFC set to  0.000000
10/19/2011	5:03:44 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	5:03:44 PM	Tube furnace set to 0
10/19/2011	5:03:45 PM	Run finished at 5:03 PM
10/19/2011	5:03:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	6:00:34 PM	Main Vac valve closed
10/19/2011	6:00:40 PM	Main Vac valve opened
10/19/2011	6:05:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/19/2011	6:06:04 PM	Recipe started at 6:05 PM
10/19/2011	6:06:04 PM	Helium valve closed
10/19/2011	6:06:04 PM	H2 valve closed
10/19/2011	6:06:04 PM	BCl3 valve closed
10/19/2011	6:06:04 PM	PH3 valve closed
10/19/2011	6:06:04 PM	SiCl4 pre valve closed
10/19/2011	6:06:04 PM	SiCl4 post valve closed
10/19/2011	6:06:04 PM	Main Vac valve closed
10/19/2011	6:06:04 PM	Bubbler valve closed
10/19/2011	6:06:04 PM	Bypass valve opened
10/19/2011	6:06:04 PM	Helium MFC set to  0.000000
10/19/2011	6:06:04 PM	H2 MFC set to  0.000000
10/19/2011	6:06:04 PM	BCl3 MFC set to  0.000000
10/19/2011	6:06:04 PM	PHl3 MFC set to  0.000000
10/19/2011	6:06:04 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:06:04 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:06:05 PM	Tube furnace set to 0
10/19/2011	6:06:05 PM	Helium valve closed
10/19/2011	6:06:05 PM	H2 valve closed
10/19/2011	6:06:05 PM	BCl3 valve closed
10/19/2011	6:06:05 PM	PH3 valve closed
10/19/2011	6:06:05 PM	SiCl4 pre valve closed
10/19/2011	6:06:05 PM	SiCl4 post valve closed
10/19/2011	6:06:05 PM	Main Vac valve closed
10/19/2011	6:06:05 PM	Bubbler valve closed
10/19/2011	6:06:05 PM	Bypass valve opened
10/19/2011	6:06:05 PM	Helium MFC set to  0.000000
10/19/2011	6:06:05 PM	H2 MFC set to  0.000000
10/19/2011	6:06:05 PM	BCl3 MFC set to  0.000000
10/19/2011	6:06:05 PM	PHl3 MFC set to  0.000000
10/19/2011	6:06:05 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:06:05 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:06:05 PM	Tube furnace set to 0
10/19/2011	6:06:05 PM	Helium valve closed
10/19/2011	6:06:05 PM	H2 valve closed
10/19/2011	6:06:05 PM	BCl3 valve closed
10/19/2011	6:06:05 PM	PH3 valve closed
10/19/2011	6:06:05 PM	SiCl4 pre valve closed
10/19/2011	6:06:05 PM	SiCl4 post valve closed
10/19/2011	6:06:05 PM	Bypass valve closed
10/19/2011	6:06:05 PM	Bubbler valve closed
10/19/2011	6:06:05 PM	Main Vac valve opened
10/19/2011	6:06:05 PM	Helium MFC set to  0.000000
10/19/2011	6:06:05 PM	H2 MFC set to  0.000000
10/19/2011	6:06:05 PM	BCl3 MFC set to  0.000000
10/19/2011	6:06:05 PM	PHl3 MFC set to  0.000000
10/19/2011	6:06:05 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:06:05 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:06:05 PM	Tube furnace set to 0
10/19/2011	6:06:36 PM	H2 valve closed
10/19/2011	6:06:36 PM	BCl3 valve closed
10/19/2011	6:06:36 PM	PH3 valve closed
10/19/2011	6:06:36 PM	SiCl4 pre valve closed
10/19/2011	6:06:36 PM	SiCl4 post valve closed
10/19/2011	6:06:36 PM	Bypass valve closed
10/19/2011	6:06:36 PM	Bubbler valve closed
10/19/2011	6:06:36 PM	Helium valve opened
10/19/2011	6:06:36 PM	Main Vac valve opened
10/19/2011	6:06:36 PM	Helium MFC set to  20.000000
10/19/2011	6:06:36 PM	H2 MFC set to  0.000000
10/19/2011	6:06:36 PM	BCl3 MFC set to  0.000000
10/19/2011	6:06:36 PM	PHl3 MFC set to  0.000000
10/19/2011	6:06:36 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:06:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:06:36 PM	Tube furnace set to 0
10/19/2011	6:07:06 PM	Helium valve closed
10/19/2011	6:07:06 PM	H2 valve closed
10/19/2011	6:07:06 PM	BCl3 valve closed
10/19/2011	6:07:06 PM	PH3 valve closed
10/19/2011	6:07:06 PM	SiCl4 pre valve closed
10/19/2011	6:07:06 PM	SiCl4 post valve closed
10/19/2011	6:07:06 PM	Bypass valve closed
10/19/2011	6:07:06 PM	Bubbler valve closed
10/19/2011	6:07:06 PM	Main Vac valve opened
10/19/2011	6:07:06 PM	Helium MFC set to  0.000000
10/19/2011	6:07:06 PM	H2 MFC set to  0.000000
10/19/2011	6:07:06 PM	BCl3 MFC set to  0.000000
10/19/2011	6:07:06 PM	PHl3 MFC set to  0.000000
10/19/2011	6:07:06 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:07:06 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:07:06 PM	Tube furnace set to 0
10/19/2011	6:07:36 PM	H2 valve closed
10/19/2011	6:07:36 PM	BCl3 valve closed
10/19/2011	6:07:36 PM	PH3 valve closed
10/19/2011	6:07:36 PM	SiCl4 pre valve closed
10/19/2011	6:07:36 PM	SiCl4 post valve closed
10/19/2011	6:07:36 PM	Bypass valve closed
10/19/2011	6:07:36 PM	Bubbler valve closed
10/19/2011	6:07:36 PM	Helium valve opened
10/19/2011	6:07:36 PM	Main Vac valve opened
10/19/2011	6:07:36 PM	Helium MFC set to  20.000000
10/19/2011	6:07:36 PM	H2 MFC set to  0.000000
10/19/2011	6:07:36 PM	BCl3 MFC set to  0.000000
10/19/2011	6:07:36 PM	PHl3 MFC set to  0.000000
10/19/2011	6:07:36 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:07:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:07:36 PM	Tube furnace set to 0
10/19/2011	6:08:06 PM	Helium valve closed
10/19/2011	6:08:06 PM	H2 valve closed
10/19/2011	6:08:06 PM	BCl3 valve closed
10/19/2011	6:08:06 PM	PH3 valve closed
10/19/2011	6:08:06 PM	SiCl4 pre valve closed
10/19/2011	6:08:06 PM	SiCl4 post valve closed
10/19/2011	6:08:06 PM	Bypass valve closed
10/19/2011	6:08:06 PM	Bubbler valve closed
10/19/2011	6:08:06 PM	Main Vac valve opened
10/19/2011	6:08:06 PM	Helium MFC set to  0.000000
10/19/2011	6:08:06 PM	H2 MFC set to  0.000000
10/19/2011	6:08:06 PM	BCl3 MFC set to  0.000000
10/19/2011	6:08:06 PM	PHl3 MFC set to  0.000000
10/19/2011	6:08:06 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:08:06 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:08:06 PM	Tube furnace set to 0
10/19/2011	6:08:36 PM	H2 valve closed
10/19/2011	6:08:36 PM	BCl3 valve closed
10/19/2011	6:08:36 PM	PH3 valve closed
10/19/2011	6:08:36 PM	SiCl4 pre valve closed
10/19/2011	6:08:36 PM	SiCl4 post valve closed
10/19/2011	6:08:36 PM	Bypass valve closed
10/19/2011	6:08:36 PM	Bubbler valve closed
10/19/2011	6:08:36 PM	Helium valve opened
10/19/2011	6:08:36 PM	Main Vac valve opened
10/19/2011	6:08:36 PM	Helium MFC set to  20.000000
10/19/2011	6:08:36 PM	H2 MFC set to  0.000000
10/19/2011	6:08:36 PM	BCl3 MFC set to  0.000000
10/19/2011	6:08:36 PM	PHl3 MFC set to  0.000000
10/19/2011	6:08:36 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:08:36 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:08:36 PM	Tube furnace set to 0
10/19/2011	6:09:06 PM	Helium valve closed
10/19/2011	6:09:06 PM	H2 valve closed
10/19/2011	6:09:06 PM	BCl3 valve closed
10/19/2011	6:09:06 PM	PH3 valve closed
10/19/2011	6:09:07 PM	SiCl4 pre valve closed
10/19/2011	6:09:07 PM	SiCl4 post valve closed
10/19/2011	6:09:07 PM	Bypass valve closed
10/19/2011	6:09:07 PM	Bubbler valve closed
10/19/2011	6:09:07 PM	Main Vac valve opened
10/19/2011	6:09:07 PM	Helium MFC set to  0.000000
10/19/2011	6:09:07 PM	H2 MFC set to  0.000000
10/19/2011	6:09:07 PM	BCl3 MFC set to  0.000000
10/19/2011	6:09:07 PM	PHl3 MFC set to  0.000000
10/19/2011	6:09:07 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:09:07 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:09:07 PM	Tube furnace set to 0
10/19/2011	6:09:37 PM	H2 valve closed
10/19/2011	6:09:37 PM	BCl3 valve closed
10/19/2011	6:09:37 PM	PH3 valve closed
10/19/2011	6:09:37 PM	SiCl4 pre valve closed
10/19/2011	6:09:37 PM	SiCl4 post valve closed
10/19/2011	6:09:37 PM	Bypass valve closed
10/19/2011	6:09:37 PM	Bubbler valve closed
10/19/2011	6:09:37 PM	Helium valve opened
10/19/2011	6:09:37 PM	Main Vac valve opened
10/19/2011	6:09:37 PM	Helium MFC set to  20.000000
10/19/2011	6:09:37 PM	H2 MFC set to  0.000000
10/19/2011	6:09:37 PM	BCl3 MFC set to  0.000000
10/19/2011	6:09:37 PM	PHl3 MFC set to  0.000000
10/19/2011	6:09:37 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:09:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:09:37 PM	Tube furnace set to 0
10/19/2011	6:10:07 PM	Helium valve closed
10/19/2011	6:10:07 PM	H2 valve closed
10/19/2011	6:10:07 PM	BCl3 valve closed
10/19/2011	6:10:07 PM	PH3 valve closed
10/19/2011	6:10:07 PM	SiCl4 pre valve closed
10/19/2011	6:10:07 PM	SiCl4 post valve closed
10/19/2011	6:10:07 PM	Bypass valve closed
10/19/2011	6:10:07 PM	Bubbler valve closed
10/19/2011	6:10:07 PM	Main Vac valve opened
10/19/2011	6:10:07 PM	Helium MFC set to  0.000000
10/19/2011	6:10:07 PM	H2 MFC set to  0.000000
10/19/2011	6:10:07 PM	BCl3 MFC set to  0.000000
10/19/2011	6:10:07 PM	PHl3 MFC set to  0.000000
10/19/2011	6:10:07 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:10:07 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:10:07 PM	Tube furnace set to 0
10/19/2011	6:10:37 PM	H2 valve closed
10/19/2011	6:10:37 PM	BCl3 valve closed
10/19/2011	6:10:37 PM	PH3 valve closed
10/19/2011	6:10:37 PM	SiCl4 pre valve closed
10/19/2011	6:10:37 PM	SiCl4 post valve closed
10/19/2011	6:10:37 PM	Bypass valve closed
10/19/2011	6:10:37 PM	Bubbler valve closed
10/19/2011	6:10:37 PM	Helium valve opened
10/19/2011	6:10:37 PM	Main Vac valve opened
10/19/2011	6:10:37 PM	Helium MFC set to  20.000000
10/19/2011	6:10:37 PM	H2 MFC set to  0.000000
10/19/2011	6:10:37 PM	BCl3 MFC set to  0.000000
10/19/2011	6:10:37 PM	PHl3 MFC set to  0.000000
10/19/2011	6:10:37 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:10:37 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:10:37 PM	Tube furnace set to 0
10/19/2011	6:11:07 PM	Helium valve closed
10/19/2011	6:11:07 PM	H2 valve closed
10/19/2011	6:11:07 PM	BCl3 valve closed
10/19/2011	6:11:07 PM	PH3 valve closed
10/19/2011	6:11:07 PM	SiCl4 pre valve closed
10/19/2011	6:11:07 PM	SiCl4 post valve closed
10/19/2011	6:11:07 PM	Bypass valve closed
10/19/2011	6:11:07 PM	Bubbler valve closed
10/19/2011	6:11:07 PM	Main Vac valve opened
10/19/2011	6:11:07 PM	Helium MFC set to  0.000000
10/19/2011	6:11:07 PM	H2 MFC set to  0.000000
10/19/2011	6:11:07 PM	BCl3 MFC set to  0.000000
10/19/2011	6:11:07 PM	PHl3 MFC set to  0.000000
10/19/2011	6:11:07 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:11:07 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:11:07 PM	Tube furnace set to 0
10/19/2011	6:11:37 PM	H2 valve closed
10/19/2011	6:11:37 PM	BCl3 valve closed
10/19/2011	6:11:37 PM	PH3 valve closed
10/19/2011	6:11:37 PM	SiCl4 pre valve closed
10/19/2011	6:11:37 PM	SiCl4 post valve closed
10/19/2011	6:11:37 PM	Bypass valve closed
10/19/2011	6:11:37 PM	Bubbler valve closed
10/19/2011	6:11:37 PM	Helium valve opened
10/19/2011	6:11:37 PM	Main Vac valve opened
10/19/2011	6:11:37 PM	Helium MFC set to  20.000000
10/19/2011	6:11:37 PM	H2 MFC set to  0.000000
10/19/2011	6:11:37 PM	BCl3 MFC set to  0.000000
10/19/2011	6:11:37 PM	PHl3 MFC set to  0.000000
10/19/2011	6:11:37 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:11:38 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:11:38 PM	Tube furnace set to 0
10/19/2011	6:12:08 PM	Helium valve closed
10/19/2011	6:12:08 PM	H2 valve closed
10/19/2011	6:12:08 PM	BCl3 valve closed
10/19/2011	6:12:08 PM	PH3 valve closed
10/19/2011	6:12:08 PM	SiCl4 pre valve closed
10/19/2011	6:12:08 PM	SiCl4 post valve closed
10/19/2011	6:12:08 PM	Bypass valve closed
10/19/2011	6:12:08 PM	Bubbler valve closed
10/19/2011	6:12:08 PM	Main Vac valve opened
10/19/2011	6:12:08 PM	Helium MFC set to  0.000000
10/19/2011	6:12:08 PM	H2 MFC set to  0.000000
10/19/2011	6:12:08 PM	BCl3 MFC set to  0.000000
10/19/2011	6:12:08 PM	PHl3 MFC set to  0.000000
10/19/2011	6:12:08 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:12:08 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:12:08 PM	Tube furnace set to 0
10/19/2011	6:12:38 PM	H2 valve closed
10/19/2011	6:12:38 PM	BCl3 valve closed
10/19/2011	6:12:38 PM	PH3 valve closed
10/19/2011	6:12:38 PM	SiCl4 pre valve closed
10/19/2011	6:12:38 PM	SiCl4 post valve closed
10/19/2011	6:12:38 PM	Bypass valve closed
10/19/2011	6:12:38 PM	Bubbler valve closed
10/19/2011	6:12:38 PM	Helium valve opened
10/19/2011	6:12:38 PM	Main Vac valve opened
10/19/2011	6:12:38 PM	Helium MFC set to  20.000000
10/19/2011	6:12:38 PM	H2 MFC set to  0.000000
10/19/2011	6:12:38 PM	BCl3 MFC set to  0.000000
10/19/2011	6:12:38 PM	PHl3 MFC set to  0.000000
10/19/2011	6:12:38 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:12:38 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:12:38 PM	Tube furnace set to 0
10/19/2011	6:13:08 PM	Helium valve closed
10/19/2011	6:13:08 PM	H2 valve closed
10/19/2011	6:13:08 PM	BCl3 valve closed
10/19/2011	6:13:08 PM	PH3 valve closed
10/19/2011	6:13:08 PM	SiCl4 pre valve closed
10/19/2011	6:13:08 PM	SiCl4 post valve closed
10/19/2011	6:13:08 PM	Bypass valve closed
10/19/2011	6:13:08 PM	Bubbler valve closed
10/19/2011	6:13:08 PM	Main Vac valve opened
10/19/2011	6:13:08 PM	Helium MFC set to  0.000000
10/19/2011	6:13:08 PM	H2 MFC set to  0.000000
10/19/2011	6:13:08 PM	BCl3 MFC set to  0.000000
10/19/2011	6:13:08 PM	PHl3 MFC set to  0.000000
10/19/2011	6:13:08 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:13:08 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:13:08 PM	Tube furnace set to 0
10/19/2011	6:13:38 PM	H2 valve closed
10/19/2011	6:13:38 PM	BCl3 valve closed
10/19/2011	6:13:38 PM	PH3 valve closed
10/19/2011	6:13:38 PM	SiCl4 pre valve closed
10/19/2011	6:13:38 PM	SiCl4 post valve closed
10/19/2011	6:13:38 PM	Bypass valve closed
10/19/2011	6:13:38 PM	Bubbler valve closed
10/19/2011	6:13:38 PM	Helium valve opened
10/19/2011	6:13:38 PM	Main Vac valve opened
10/19/2011	6:13:38 PM	Helium MFC set to  20.000000
10/19/2011	6:13:38 PM	H2 MFC set to  0.000000
10/19/2011	6:13:38 PM	BCl3 MFC set to  0.000000
10/19/2011	6:13:38 PM	PHl3 MFC set to  0.000000
10/19/2011	6:13:38 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:13:38 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:13:38 PM	Tube furnace set to 0
10/19/2011	6:14:08 PM	Helium valve closed
10/19/2011	6:14:08 PM	H2 valve closed
10/19/2011	6:14:08 PM	BCl3 valve closed
10/19/2011	6:14:08 PM	PH3 valve closed
10/19/2011	6:14:08 PM	SiCl4 pre valve closed
10/19/2011	6:14:08 PM	SiCl4 post valve closed
10/19/2011	6:14:08 PM	Bypass valve closed
10/19/2011	6:14:08 PM	Bubbler valve closed
10/19/2011	6:14:08 PM	Main Vac valve opened
10/19/2011	6:14:08 PM	Helium MFC set to  0.000000
10/19/2011	6:14:08 PM	H2 MFC set to  0.000000
10/19/2011	6:14:08 PM	BCl3 MFC set to  0.000000
10/19/2011	6:14:08 PM	PHl3 MFC set to  0.000000
10/19/2011	6:14:08 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:14:08 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:14:09 PM	Tube furnace set to 0
10/19/2011	6:14:39 PM	H2 valve closed
10/19/2011	6:14:39 PM	BCl3 valve closed
10/19/2011	6:14:39 PM	PH3 valve closed
10/19/2011	6:14:39 PM	SiCl4 pre valve closed
10/19/2011	6:14:39 PM	SiCl4 post valve closed
10/19/2011	6:14:39 PM	Bypass valve closed
10/19/2011	6:14:39 PM	Bubbler valve closed
10/19/2011	6:14:39 PM	Helium valve opened
10/19/2011	6:14:39 PM	Main Vac valve opened
10/19/2011	6:14:39 PM	Helium MFC set to  20.000000
10/19/2011	6:14:39 PM	H2 MFC set to  0.000000
10/19/2011	6:14:39 PM	BCl3 MFC set to  0.000000
10/19/2011	6:14:39 PM	PHl3 MFC set to  0.000000
10/19/2011	6:14:39 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:14:39 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:14:39 PM	Tube furnace set to 0
10/19/2011	6:15:09 PM	Helium valve closed
10/19/2011	6:15:09 PM	H2 valve closed
10/19/2011	6:15:09 PM	BCl3 valve closed
10/19/2011	6:15:09 PM	PH3 valve closed
10/19/2011	6:15:09 PM	SiCl4 pre valve closed
10/19/2011	6:15:09 PM	SiCl4 post valve closed
10/19/2011	6:15:09 PM	Bypass valve closed
10/19/2011	6:15:09 PM	Bubbler valve closed
10/19/2011	6:15:09 PM	Main Vac valve opened
10/19/2011	6:15:09 PM	Helium MFC set to  0.000000
10/19/2011	6:15:09 PM	H2 MFC set to  0.000000
10/19/2011	6:15:09 PM	BCl3 MFC set to  0.000000
10/19/2011	6:15:09 PM	PHl3 MFC set to  0.000000
10/19/2011	6:15:09 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:15:09 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:15:09 PM	Tube furnace set to 0
10/19/2011	6:15:39 PM	H2 valve closed
10/19/2011	6:15:39 PM	BCl3 valve closed
10/19/2011	6:15:39 PM	PH3 valve closed
10/19/2011	6:15:39 PM	SiCl4 pre valve closed
10/19/2011	6:15:39 PM	SiCl4 post valve closed
10/19/2011	6:15:39 PM	Bypass valve closed
10/19/2011	6:15:39 PM	Bubbler valve closed
10/19/2011	6:15:39 PM	Helium valve opened
10/19/2011	6:15:39 PM	Main Vac valve opened
10/19/2011	6:15:39 PM	Helium MFC set to  20.000000
10/19/2011	6:15:39 PM	H2 MFC set to  0.000000
10/19/2011	6:15:39 PM	BCl3 MFC set to  0.000000
10/19/2011	6:15:39 PM	PHl3 MFC set to  0.000000
10/19/2011	6:15:39 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:15:39 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:15:39 PM	Tube furnace set to 0
10/19/2011	6:16:09 PM	Helium valve closed
10/19/2011	6:16:09 PM	H2 valve closed
10/19/2011	6:16:09 PM	BCl3 valve closed
10/19/2011	6:16:09 PM	PH3 valve closed
10/19/2011	6:16:09 PM	SiCl4 pre valve closed
10/19/2011	6:16:09 PM	SiCl4 post valve closed
10/19/2011	6:16:09 PM	Bypass valve closed
10/19/2011	6:16:09 PM	Bubbler valve closed
10/19/2011	6:16:09 PM	Main Vac valve opened
10/19/2011	6:16:09 PM	Helium MFC set to  0.000000
10/19/2011	6:16:09 PM	H2 MFC set to  0.000000
10/19/2011	6:16:09 PM	BCl3 MFC set to  0.000000
10/19/2011	6:16:09 PM	PHl3 MFC set to  0.000000
10/19/2011	6:16:09 PM	SiCl4 MFC set to  0.000000
10/19/2011	6:16:09 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	6:16:09 PM	Tube furnace set to 0
10/19/2011	6:16:10 PM	Run finished at 6:16 PM
10/19/2011	6:16:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/19/2011	6:32:52 PM	Main Vac valve closed
10/19/2011	6:33:01 PM	Main Vac valve opened
10/19/2011	9:00:17 PM	Main Vac valve closed
10/19/2011	9:00:38 PM	Main Vac valve opened
10/19/2011	9:02:11 PM	Recipe started at 9:02 PM
10/19/2011	9:02:11 PM	Helium valve closed
10/19/2011	9:02:11 PM	H2 valve closed
10/19/2011	9:02:11 PM	BCl3 valve closed
10/19/2011	9:02:11 PM	PH3 valve closed
10/19/2011	9:02:11 PM	SiCl4 pre valve closed
10/19/2011	9:02:11 PM	SiCl4 post valve closed
10/19/2011	9:02:11 PM	Main Vac valve closed
10/19/2011	9:02:11 PM	Bypass valve closed
10/19/2011	9:02:11 PM	Bubbler valve closed
10/19/2011	9:02:11 PM	Helium MFC set to  0.000000
10/19/2011	9:02:11 PM	H2 MFC set to  0.000000
10/19/2011	9:02:11 PM	BCl3 MFC set to  0.000000
10/19/2011	9:02:11 PM	PHl3 MFC set to  0.000000
10/19/2011	9:02:11 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:02:11 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:02:12 PM	Tube furnace set to 0
10/19/2011	9:02:15 PM	Helium valve closed
10/19/2011	9:02:15 PM	BCl3 valve closed
10/19/2011	9:02:15 PM	PH3 valve closed
10/19/2011	9:02:15 PM	SiCl4 pre valve closed
10/19/2011	9:02:15 PM	SiCl4 post valve closed
10/19/2011	9:02:15 PM	Main Vac valve closed
10/19/2011	9:02:15 PM	Bypass valve closed
10/19/2011	9:02:15 PM	Bubbler valve closed
10/19/2011	9:02:15 PM	H2 valve opened
10/19/2011	9:02:15 PM	Helium MFC set to  0.000000
10/19/2011	9:02:15 PM	H2 MFC set to  500.000000
10/19/2011	9:02:15 PM	BCl3 MFC set to  0.000000
10/19/2011	9:02:15 PM	PHl3 MFC set to  0.000000
10/19/2011	9:02:15 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:02:15 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:02:15 PM	Tube furnace set to 0
10/19/2011	9:03:23 PM	Helium valve closed
10/19/2011	9:03:23 PM	BCl3 valve closed
10/19/2011	9:03:23 PM	PH3 valve closed
10/19/2011	9:03:23 PM	SiCl4 pre valve closed
10/19/2011	9:03:23 PM	SiCl4 post valve closed
10/19/2011	9:03:23 PM	Main Vac valve closed
10/19/2011	9:03:23 PM	Bypass valve closed
10/19/2011	9:03:23 PM	H2 valve opened
10/19/2011	9:03:23 PM	Bubbler valve opened
10/19/2011	9:03:23 PM	Helium MFC set to  0.000000
10/19/2011	9:03:23 PM	H2 MFC set to  500.000000
10/19/2011	9:03:23 PM	BCl3 MFC set to  0.000000
10/19/2011	9:03:23 PM	PHl3 MFC set to  0.000000
10/19/2011	9:03:23 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:03:23 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:03:23 PM	Tube furnace set to 0
10/19/2011	9:03:24 PM	Helium valve closed
10/19/2011	9:03:24 PM	BCl3 valve closed
10/19/2011	9:03:24 PM	PH3 valve closed
10/19/2011	9:03:24 PM	SiCl4 pre valve closed
10/19/2011	9:03:24 PM	SiCl4 post valve closed
10/19/2011	9:03:24 PM	Main Vac valve closed
10/19/2011	9:03:24 PM	Bypass valve closed
10/19/2011	9:03:24 PM	H2 valve opened
10/19/2011	9:03:24 PM	Bubbler valve opened
10/19/2011	9:03:24 PM	Helium MFC set to  0.000000
10/19/2011	9:03:24 PM	H2 MFC set to  500.000000
10/19/2011	9:03:24 PM	BCl3 MFC set to  0.000000
10/19/2011	9:03:24 PM	PHl3 MFC set to  0.000000
10/19/2011	9:03:24 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:03:24 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:03:24 PM	Tube furnace set to 1000
10/19/2011	9:23:24 PM	Helium valve closed
10/19/2011	9:23:24 PM	BCl3 valve closed
10/19/2011	9:23:24 PM	PH3 valve closed
10/19/2011	9:23:24 PM	Main Vac valve closed
10/19/2011	9:23:24 PM	Bypass valve closed
10/19/2011	9:23:24 PM	H2 valve opened
10/19/2011	9:23:24 PM	SiCl4 pre valve opened
10/19/2011	9:23:24 PM	SiCl4 post valve opened
10/19/2011	9:23:24 PM	Bubbler valve opened
10/19/2011	9:23:24 PM	Helium MFC set to  0.000000
10/19/2011	9:23:24 PM	H2 MFC set to  500.000000
10/19/2011	9:23:24 PM	BCl3 MFC set to  0.000000
10/19/2011	9:23:24 PM	PHl3 MFC set to  0.000000
10/19/2011	9:23:24 PM	SiCl4 MFC set to  50.000000
10/19/2011	9:23:24 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:23:24 PM	Tube furnace set to 1000
10/19/2011	9:41:52 PM	Helium valve closed
10/19/2011	9:41:52 PM	BCl3 valve closed
10/19/2011	9:41:52 PM	PH3 valve closed
10/19/2011	9:41:52 PM	SiCl4 pre valve closed
10/19/2011	9:41:52 PM	SiCl4 post valve closed
10/19/2011	9:41:52 PM	Main Vac valve closed
10/19/2011	9:41:52 PM	Bypass valve closed
10/19/2011	9:41:52 PM	H2 valve opened
10/19/2011	9:41:52 PM	Bubbler valve opened
10/19/2011	9:41:52 PM	Helium MFC set to  0.000000
10/19/2011	9:41:52 PM	H2 MFC set to  500.000000
10/19/2011	9:41:52 PM	BCl3 MFC set to  0.000000
10/19/2011	9:41:52 PM	PHl3 MFC set to  0.000000
10/19/2011	9:41:52 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:41:52 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:41:52 PM	Tube furnace set to 950
10/19/2011	9:42:19 PM	Helium valve closed
10/19/2011	9:42:19 PM	BCl3 valve closed
10/19/2011	9:42:19 PM	PH3 valve closed
10/19/2011	9:42:19 PM	SiCl4 pre valve closed
10/19/2011	9:42:19 PM	SiCl4 post valve closed
10/19/2011	9:42:19 PM	Main Vac valve closed
10/19/2011	9:42:19 PM	Bypass valve closed
10/19/2011	9:42:19 PM	H2 valve opened
10/19/2011	9:42:19 PM	Bubbler valve opened
10/19/2011	9:42:19 PM	Helium MFC set to  0.000000
10/19/2011	9:42:19 PM	H2 MFC set to  500.000000
10/19/2011	9:42:19 PM	BCl3 MFC set to  0.000000
10/19/2011	9:42:19 PM	PHl3 MFC set to  0.000000
10/19/2011	9:42:19 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:42:19 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:42:19 PM	Tube furnace set to 850
10/19/2011	9:42:20 PM	H2 valve closed
10/19/2011	9:42:20 PM	BCl3 valve closed
10/19/2011	9:42:20 PM	PH3 valve closed
10/19/2011	9:42:20 PM	SiCl4 pre valve closed
10/19/2011	9:42:20 PM	SiCl4 post valve closed
10/19/2011	9:42:20 PM	Main Vac valve closed
10/19/2011	9:42:20 PM	Bypass valve closed
10/19/2011	9:42:20 PM	Helium valve opened
10/19/2011	9:42:20 PM	Bubbler valve opened
10/19/2011	9:42:20 PM	Helium MFC set to  500.000000
10/19/2011	9:42:20 PM	H2 MFC set to  0.000000
10/19/2011	9:42:20 PM	BCl3 MFC set to  0.000000
10/19/2011	9:42:20 PM	PHl3 MFC set to  0.000000
10/19/2011	9:42:20 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:42:20 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:42:21 PM	Tube furnace set to 0
10/19/2011	9:57:01 PM	Helium valve closed
10/19/2011	9:57:01 PM	H2 valve closed
10/19/2011	9:57:01 PM	BCl3 valve closed
10/19/2011	9:57:01 PM	PH3 valve closed
10/19/2011	9:57:01 PM	SiCl4 pre valve closed
10/19/2011	9:57:01 PM	SiCl4 post valve closed
10/19/2011	9:57:01 PM	Main Vac valve closed
10/19/2011	9:57:01 PM	Bypass valve closed
10/19/2011	9:57:01 PM	Bubbler valve closed
10/19/2011	9:57:01 PM	Helium MFC set to  0.000000
10/19/2011	9:57:01 PM	H2 MFC set to  0.000000
10/19/2011	9:57:01 PM	BCl3 MFC set to  0.000000
10/19/2011	9:57:01 PM	PHl3 MFC set to  0.000000
10/19/2011	9:57:01 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:57:01 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:57:02 PM	Tube furnace set to 0
10/19/2011	9:57:03 PM	Run finished at 9:57 PM
10/19/2011	9:59:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/19/2011	9:59:39 PM	Recipe started at 9:59 PM
10/19/2011	9:59:39 PM	Helium valve closed
10/19/2011	9:59:39 PM	H2 valve closed
10/19/2011	9:59:39 PM	BCl3 valve closed
10/19/2011	9:59:39 PM	PH3 valve closed
10/19/2011	9:59:39 PM	SiCl4 pre valve closed
10/19/2011	9:59:39 PM	SiCl4 post valve closed
10/19/2011	9:59:39 PM	Main Vac valve closed
10/19/2011	9:59:39 PM	Bubbler valve closed
10/19/2011	9:59:39 PM	Bypass valve opened
10/19/2011	9:59:39 PM	Helium MFC set to  0.000000
10/19/2011	9:59:39 PM	H2 MFC set to  0.000000
10/19/2011	9:59:39 PM	BCl3 MFC set to  0.000000
10/19/2011	9:59:39 PM	PHl3 MFC set to  0.000000
10/19/2011	9:59:39 PM	SiCl4 MFC set to  0.000000
10/19/2011	9:59:39 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	9:59:39 PM	Tube furnace set to 0
10/19/2011	10:02:46 PM	Helium valve closed
10/19/2011	10:02:46 PM	H2 valve closed
10/19/2011	10:02:46 PM	BCl3 valve closed
10/19/2011	10:02:46 PM	PH3 valve closed
10/19/2011	10:02:46 PM	SiCl4 pre valve closed
10/19/2011	10:02:46 PM	SiCl4 post valve closed
10/19/2011	10:02:46 PM	Main Vac valve closed
10/19/2011	10:02:46 PM	Bubbler valve closed
10/19/2011	10:02:46 PM	Bypass valve opened
10/19/2011	10:02:46 PM	Helium MFC set to  0.000000
10/19/2011	10:02:46 PM	H2 MFC set to  0.000000
10/19/2011	10:02:46 PM	BCl3 MFC set to  0.000000
10/19/2011	10:02:46 PM	PHl3 MFC set to  0.000000
10/19/2011	10:02:46 PM	SiCl4 MFC set to  0.000000
10/19/2011	10:02:46 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	10:02:47 PM	Tube furnace set to 0
10/19/2011	10:03:47 PM	Helium valve closed
10/19/2011	10:03:47 PM	H2 valve closed
10/19/2011	10:03:47 PM	BCl3 valve closed
10/19/2011	10:03:47 PM	PH3 valve closed
10/19/2011	10:03:47 PM	SiCl4 pre valve closed
10/19/2011	10:03:47 PM	SiCl4 post valve closed
10/19/2011	10:03:47 PM	Bypass valve closed
10/19/2011	10:03:47 PM	Bubbler valve closed
10/19/2011	10:03:47 PM	Main Vac valve opened
10/19/2011	10:03:47 PM	Helium MFC set to  0.000000
10/19/2011	10:03:47 PM	H2 MFC set to  0.000000
10/19/2011	10:03:47 PM	BCl3 MFC set to  0.000000
10/19/2011	10:03:47 PM	PHl3 MFC set to  0.000000
10/19/2011	10:03:47 PM	SiCl4 MFC set to  0.000000
10/19/2011	10:03:47 PM	Bypass solenoid MFC set to  0.000000
10/19/2011	10:03:47 PM	Tube furnace set to 0
10/19/2011	10:03:48 PM	Run finished at 10:03 PM
10/19/2011	10:03:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
